JPH01173934U - - Google Patents
Info
- Publication number
- JPH01173934U JPH01173934U JP7087588U JP7087588U JPH01173934U JP H01173934 U JPH01173934 U JP H01173934U JP 7087588 U JP7087588 U JP 7087588U JP 7087588 U JP7087588 U JP 7087588U JP H01173934 U JPH01173934 U JP H01173934U
- Authority
- JP
- Japan
- Prior art keywords
- washing
- type water
- swingable
- view
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図はこの考案の一実施例を示す平面図、第
２図はその正面断面図、第３図は従来のオーバー
フロー式水洗槽を示す側面断面図、第４図はその
平面図である。
図において、１は水洗槽、３は上底、６は下台
、７はモータ、８は外箱である。なお、図中、同
一符号は同一、又は相当部分を示す。
FIG. 1 is a plan view showing an embodiment of this invention, FIG. 2 is a front sectional view thereof, FIG. 3 is a side sectional view showing a conventional overflow type water washing tank, and FIG. 4 is a plan view thereof. In the figure, 1 is a washing tank, 3 is an upper base, 6 is a lower stand, 7 is a motor, and 8 is an outer box. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
おいて、水洗槽を揺動可能に構成したことを特徴
とするオーバーフロー式水洗装置。 An overflow type water washing apparatus for washing wafers, characterized in that a washing tank is configured to be swingable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7087588U JPH01173934U (en) | 1988-05-26 | 1988-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7087588U JPH01173934U (en) | 1988-05-26 | 1988-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173934U true JPH01173934U (en) | 1989-12-11 |
Family
ID=31296093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7087588U Pending JPH01173934U (en) | 1988-05-26 | 1988-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173934U (en) |
-
1988
- 1988-05-26 JP JP7087588U patent/JPH01173934U/ja active Pending