JPS62140722U - - Google Patents
Info
- Publication number
- JPS62140722U JPS62140722U JP2761086U JP2761086U JPS62140722U JP S62140722 U JPS62140722 U JP S62140722U JP 2761086 U JP2761086 U JP 2761086U JP 2761086 U JP2761086 U JP 2761086U JP S62140722 U JPS62140722 U JP S62140722U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- semiconductor substrate
- heating plate
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2761086U JPS62140722U (enExample) | 1986-02-28 | 1986-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2761086U JPS62140722U (enExample) | 1986-02-28 | 1986-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62140722U true JPS62140722U (enExample) | 1987-09-05 |
Family
ID=30829801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2761086U Pending JPS62140722U (enExample) | 1986-02-28 | 1986-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140722U (enExample) |
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1986
- 1986-02-28 JP JP2761086U patent/JPS62140722U/ja active Pending