JPS62138704A - 測長器 - Google Patents

測長器

Info

Publication number
JPS62138704A
JPS62138704A JP60280417A JP28041785A JPS62138704A JP S62138704 A JPS62138704 A JP S62138704A JP 60280417 A JP60280417 A JP 60280417A JP 28041785 A JP28041785 A JP 28041785A JP S62138704 A JPS62138704 A JP S62138704A
Authority
JP
Japan
Prior art keywords
measurement
wavelength
phase delay
distance
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60280417A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575242B2 (https=
Inventor
Toshitsugu Ueda
敏嗣 植田
Eiji Ogita
英治 荻田
Katsumi Isozaki
克巳 磯崎
Katsuya Ikezawa
克哉 池澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP60280417A priority Critical patent/JPS62138704A/ja
Publication of JPS62138704A publication Critical patent/JPS62138704A/ja
Publication of JPH0575242B2 publication Critical patent/JPH0575242B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP60280417A 1985-12-13 1985-12-13 測長器 Granted JPS62138704A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60280417A JPS62138704A (ja) 1985-12-13 1985-12-13 測長器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60280417A JPS62138704A (ja) 1985-12-13 1985-12-13 測長器

Publications (2)

Publication Number Publication Date
JPS62138704A true JPS62138704A (ja) 1987-06-22
JPH0575242B2 JPH0575242B2 (https=) 1993-10-20

Family

ID=17624754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60280417A Granted JPS62138704A (ja) 1985-12-13 1985-12-13 測長器

Country Status (1)

Country Link
JP (1) JPS62138704A (https=)

Also Published As

Publication number Publication date
JPH0575242B2 (https=) 1993-10-20

Similar Documents

Publication Publication Date Title
US4759628A (en) Wavelength scanning interferometry and interferometer employing laser diode
JPH01503172A (ja) 光学的ヘテロダイン処理を有する2波長のインターフェロメトリーのための方法および装置と位置または距離測定のための使用
JPH039202A (ja) 測長方法及び装置
JPH04331333A (ja) 波長変化測定装置
EP0402794B1 (en) Diffraction encoded position measuring apparatus
JP2002333371A (ja) 波長計
JP2023036027A (ja) 計測システムで用いるためのヘテロダイン光源
JP3389799B2 (ja) 測長装置
JPS62138704A (ja) 測長器
JPS62135703A (ja) 測長器
JPS62215803A (ja) 測長器
JPH0575241B2 (https=)
US20090147265A1 (en) Detection system for detecting translations of a body
JPS62204103A (ja) 測長器
US5384638A (en) Sampling-type optical voltage detector utilizing movement of interference fringe
JPS62135708A (ja) 3次元形状測定装置
SU1275322A1 (ru) Фазометрическое устройство
JPH0695004B2 (ja) 3次元形状測定装置
JPH0695003B2 (ja) 測長器
JPH0641845B2 (ja) 測長器
WO2025182892A1 (ja) 変位計測装置、変位計測方法及びスケールピッチ測定装置
JPH0641844B2 (ja) 測長器
JP2004245626A (ja) 波長変化特性評価装置
JP2023035989A (ja) デジタルホログラフィ計測システム
JPH02287105A (ja) アブソリュート測長器