JPS6213812B2 - - Google Patents

Info

Publication number
JPS6213812B2
JPS6213812B2 JP14649676A JP14649676A JPS6213812B2 JP S6213812 B2 JPS6213812 B2 JP S6213812B2 JP 14649676 A JP14649676 A JP 14649676A JP 14649676 A JP14649676 A JP 14649676A JP S6213812 B2 JPS6213812 B2 JP S6213812B2
Authority
JP
Japan
Prior art keywords
ring
reaction tube
reaction
connecting ring
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14649676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5371567A (en
Inventor
Masakuni Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14649676A priority Critical patent/JPS5371567A/ja
Publication of JPS5371567A publication Critical patent/JPS5371567A/ja
Publication of JPS6213812B2 publication Critical patent/JPS6213812B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP14649676A 1976-12-08 1976-12-08 Reaction equipment Granted JPS5371567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14649676A JPS5371567A (en) 1976-12-08 1976-12-08 Reaction equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14649676A JPS5371567A (en) 1976-12-08 1976-12-08 Reaction equipment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP12600585A Division JPS6127624A (ja) 1985-06-12 1985-06-12 反応装置

Publications (2)

Publication Number Publication Date
JPS5371567A JPS5371567A (en) 1978-06-26
JPS6213812B2 true JPS6213812B2 (enrdf_load_stackoverflow) 1987-03-28

Family

ID=15408929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14649676A Granted JPS5371567A (en) 1976-12-08 1976-12-08 Reaction equipment

Country Status (1)

Country Link
JP (1) JPS5371567A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944821A (ja) * 1982-09-07 1984-03-13 Toshiba Corp 半導体熱処理容器
JPS6027690A (ja) * 1983-07-25 1985-02-12 Ulvac Corp 気相エピタキシヤル成長用化学反応装置

Also Published As

Publication number Publication date
JPS5371567A (en) 1978-06-26

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