JPS62136428A - 角形マスク基板移送機構 - Google Patents

角形マスク基板移送機構

Info

Publication number
JPS62136428A
JPS62136428A JP27432285A JP27432285A JPS62136428A JP S62136428 A JPS62136428 A JP S62136428A JP 27432285 A JP27432285 A JP 27432285A JP 27432285 A JP27432285 A JP 27432285A JP S62136428 A JPS62136428 A JP S62136428A
Authority
JP
Japan
Prior art keywords
work
workpiece
mask substrate
mounting table
transfer mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27432285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545489B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Iizuka
飯塚　信行
Tsunemi Fukushima
福島　常美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP27432285A priority Critical patent/JPS62136428A/ja
Publication of JPS62136428A publication Critical patent/JPS62136428A/ja
Publication of JPH0545489B2 publication Critical patent/JPH0545489B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP27432285A 1985-12-07 1985-12-07 角形マスク基板移送機構 Granted JPS62136428A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27432285A JPS62136428A (ja) 1985-12-07 1985-12-07 角形マスク基板移送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27432285A JPS62136428A (ja) 1985-12-07 1985-12-07 角形マスク基板移送機構

Publications (2)

Publication Number Publication Date
JPS62136428A true JPS62136428A (ja) 1987-06-19
JPH0545489B2 JPH0545489B2 (enrdf_load_stackoverflow) 1993-07-09

Family

ID=17540032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27432285A Granted JPS62136428A (ja) 1985-12-07 1985-12-07 角形マスク基板移送機構

Country Status (1)

Country Link
JP (1) JPS62136428A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117435U (ja) * 1991-03-29 1992-10-21 大日本スクリーン製造株式会社 基板の表面処理装置
US5746234A (en) * 1994-11-18 1998-05-05 Advanced Chemill Systems Method and apparatus for cleaning thin substrates
US6168663B1 (en) 1995-06-07 2001-01-02 Eamon P. McDonald Thin sheet handling system cross-reference to related applications
JP2003095435A (ja) * 2001-09-27 2003-04-03 Ebara Corp 四辺形基板搬送ロボット
US6746198B2 (en) * 1998-05-20 2004-06-08 Applied Materials, Inc. Substrate transfer shuttle
ITRM20090172A1 (it) * 2009-04-15 2010-10-16 Luis Maria Antonello "dispositivo di trascinamento di celle fotovoltaiche o dei loro substrati durante il processo di fabbricazione delle celle fotovoltaiche"
US20130121802A1 (en) * 2011-11-14 2013-05-16 Memc Electronic Materials, Inc. Wafer Transport Cart

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117435U (ja) * 1991-03-29 1992-10-21 大日本スクリーン製造株式会社 基板の表面処理装置
US5746234A (en) * 1994-11-18 1998-05-05 Advanced Chemill Systems Method and apparatus for cleaning thin substrates
US6273105B1 (en) 1994-11-18 2001-08-14 Eamon P. McDonald Method and apparatus for cleaning thin substrates
US6168663B1 (en) 1995-06-07 2001-01-02 Eamon P. McDonald Thin sheet handling system cross-reference to related applications
US6746198B2 (en) * 1998-05-20 2004-06-08 Applied Materials, Inc. Substrate transfer shuttle
JP2003095435A (ja) * 2001-09-27 2003-04-03 Ebara Corp 四辺形基板搬送ロボット
ITRM20090172A1 (it) * 2009-04-15 2010-10-16 Luis Maria Antonello "dispositivo di trascinamento di celle fotovoltaiche o dei loro substrati durante il processo di fabbricazione delle celle fotovoltaiche"
WO2010119470A1 (en) * 2009-04-15 2010-10-21 Luis Maria Antonello Device for driving photovoltaic cells or their substrates during the process for manufacture of the photovoltaic cells
US20130121802A1 (en) * 2011-11-14 2013-05-16 Memc Electronic Materials, Inc. Wafer Transport Cart

Also Published As

Publication number Publication date
JPH0545489B2 (enrdf_load_stackoverflow) 1993-07-09

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