JPS6212988Y2 - - Google Patents
Info
- Publication number
- JPS6212988Y2 JPS6212988Y2 JP2268880U JP2268880U JPS6212988Y2 JP S6212988 Y2 JPS6212988 Y2 JP S6212988Y2 JP 2268880 U JP2268880 U JP 2268880U JP 2268880 U JP2268880 U JP 2268880U JP S6212988 Y2 JPS6212988 Y2 JP S6212988Y2
- Authority
- JP
- Japan
- Prior art keywords
- helium
- bottom plate
- chamber
- inspected
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000001307 helium Substances 0.000 claims description 49
- 229910052734 helium Inorganic materials 0.000 claims description 49
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 49
- 238000012360 testing method Methods 0.000 claims description 26
- 238000012856 packing Methods 0.000 claims description 12
- 230000003028 elevating effect Effects 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000010924 continuous production Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2268880U JPS6212988Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-02-22 | 1980-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2268880U JPS6212988Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-02-22 | 1980-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56124857U JPS56124857U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-09-22 |
| JPS6212988Y2 true JPS6212988Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-04-03 |
Family
ID=29618806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2268880U Expired JPS6212988Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-02-22 | 1980-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6212988Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1980
- 1980-02-22 JP JP2268880U patent/JPS6212988Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56124857U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-09-22 |