JPH0122113Y2 - - Google Patents

Info

Publication number

JPH0122113Y2

JPH0122113Y2 JP8138380U JP8138380U JPH0122113Y2 JP H0122113 Y2 JPH0122113 Y2 JP H0122113Y2 JP 8138380 U JP8138380 U JP 8138380U JP 8138380 U JP8138380 U JP 8138380U JP H0122113 Y2 JPH0122113 Y2 JP H0122113Y2

Authority

JP

Japan

Prior art keywords

helium

workpiece

valve

chamber

sealed

Prior art date

1980-06-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 238000012360 testing method Methods 0.000 claims description 35
• 239000001307 helium Substances 0.000 claims description 33
• 229910052734 helium Inorganic materials 0.000 claims description 33
• SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 33
• 238000012856 packing Methods 0.000 claims description 12
• 238000007689 inspection Methods 0.000 claims description 9
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
• 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
• 238000003825 pressing Methods 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 4
• 238000010586 diagram Methods 0.000 description 9
• 239000007789 gas Substances 0.000 description 8
• 230000012010 growth Effects 0.000 description 6
• 230000034655 secondary growth Effects 0.000 description 6
• 238000000034 method Methods 0.000 description 5
• 230000007547 defect Effects 0.000 description 2
• 238000001514 detection method Methods 0.000 description 2
• 229910052757 nitrogen Inorganic materials 0.000 description 2
• 238000011084 recovery Methods 0.000 description 2
• 238000004378 air conditioning Methods 0.000 description 1
• 238000004891 communication Methods 0.000 description 1
• 238000010924 continuous production Methods 0.000 description 1
• 238000000605 extraction Methods 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 238000005057 refrigeration Methods 0.000 description 1
• 238000007789 sealing Methods 0.000 description 1
• 238000010998 test method Methods 0.000 description 1