JPS62128605A - 弾性表面波素子 - Google Patents
弾性表面波素子Info
- Publication number
- JPS62128605A JPS62128605A JP26876285A JP26876285A JPS62128605A JP S62128605 A JPS62128605 A JP S62128605A JP 26876285 A JP26876285 A JP 26876285A JP 26876285 A JP26876285 A JP 26876285A JP S62128605 A JPS62128605 A JP S62128605A
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- reflector
- line width
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 76
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 12
- 230000005855 radiation Effects 0.000 claims description 5
- 238000000206 photolithography Methods 0.000 claims description 4
- 238000003780 insertion Methods 0.000 abstract description 3
- 230000037431 insertion Effects 0.000 abstract description 3
- 230000009467 reduction Effects 0.000 abstract description 2
- 101150023883 ethR gene Proteins 0.000 abstract 3
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26876285A JPS62128605A (ja) | 1985-11-29 | 1985-11-29 | 弾性表面波素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26876285A JPS62128605A (ja) | 1985-11-29 | 1985-11-29 | 弾性表面波素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62128605A true JPS62128605A (ja) | 1987-06-10 |
| JPH0351328B2 JPH0351328B2 (enrdf_load_stackoverflow) | 1991-08-06 |
Family
ID=17462966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26876285A Granted JPS62128605A (ja) | 1985-11-29 | 1985-11-29 | 弾性表面波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128605A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02250415A (ja) * | 1989-03-23 | 1990-10-08 | Murata Mfg Co Ltd | 弾性表面波装置 |
| JPH02295212A (ja) * | 1989-05-09 | 1990-12-06 | Fujitsu Ltd | 弾性表面波共振子 |
| JPH0993072A (ja) * | 1995-09-26 | 1997-04-04 | Fujitsu Ltd | 表面弾性波フィルタ |
| JP2007228125A (ja) * | 2006-02-22 | 2007-09-06 | Seiko Epson Corp | 弾性表面波共振子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711520A (en) * | 1980-06-25 | 1982-01-21 | Toshiba Corp | Elastic surface wave resonator |
-
1985
- 1985-11-29 JP JP26876285A patent/JPS62128605A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711520A (en) * | 1980-06-25 | 1982-01-21 | Toshiba Corp | Elastic surface wave resonator |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02250415A (ja) * | 1989-03-23 | 1990-10-08 | Murata Mfg Co Ltd | 弾性表面波装置 |
| JPH02295212A (ja) * | 1989-05-09 | 1990-12-06 | Fujitsu Ltd | 弾性表面波共振子 |
| JPH0993072A (ja) * | 1995-09-26 | 1997-04-04 | Fujitsu Ltd | 表面弾性波フィルタ |
| JP2007228125A (ja) * | 2006-02-22 | 2007-09-06 | Seiko Epson Corp | 弾性表面波共振子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0351328B2 (enrdf_load_stackoverflow) | 1991-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |