JPS62126592U - - Google Patents
Info
- Publication number
- JPS62126592U JPS62126592U JP285287U JP285287U JPS62126592U JP S62126592 U JPS62126592 U JP S62126592U JP 285287 U JP285287 U JP 285287U JP 285287 U JP285287 U JP 285287U JP S62126592 U JPS62126592 U JP S62126592U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- vacuum side
- turbo
- bearing means
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP285287U JPS62126592U (enExample) | 1987-01-14 | 1987-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP285287U JPS62126592U (enExample) | 1987-01-14 | 1987-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126592U true JPS62126592U (enExample) | 1987-08-11 |
Family
ID=30782076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP285287U Pending JPS62126592U (enExample) | 1987-01-14 | 1987-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126592U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180024595A (ko) * | 2016-08-30 | 2018-03-08 | 주식회사 만도 | 완충기의 에너지 회생장치 |
-
1987
- 1987-01-14 JP JP285287U patent/JPS62126592U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180024595A (ko) * | 2016-08-30 | 2018-03-08 | 주식회사 만도 | 완충기의 에너지 회생장치 |