JPS6212562A - Automatic housing device for square mask - Google Patents

Abstract

PURPOSE:To securely receive a number of square masks from a conveying arm in order by providing a driving means for vertically moving a cassette in parallel, to a cassette supporting means. CONSTITUTION:A mask placing table 3 is lifted up above a reference surface, and a square mask 1 held by square mask conveying arms 16a, 16b is carried in and placed on the mask placing table 3. Then, when the mask placing table 3 is lowered, the square mask 1 is quietly supported by conical roller trains 2a, 2b. A cassette 12 is vertically moved to obtain a proper height, and the square mask 1 is quietly pushed into the cassette 12 with a pusher 8. Since the mask placing table 3 has already been lowered, it will not interfere with the pusher 8. This procedure is repeated while feeding the cassette 12 by pitch either upward or downward in order and, when a defined number of square masks 1 have been housed in the cassette 12, it is replaced with an empty cassette.

Description

Detailed Description of the Invention [Field of Application of the Invention] The present invention is directed to a process of producing and inspecting a large number of square masks, in which square masks are received in sequence and stored in a square mask storage cassette. It relates to automatic equipment for

[Background of the invention]

Corner masks are generally processed and inspected on an assembly line using automatic machines.

In order to fully utilize the automatic functions of such automatic processing machines and automatic inspection machines, it is desired to develop a device that automatically stores square masks in cassettes.

This type of automatic square mask storage device must satisfy many conditions as shown below, and conventional devices have not been able to completely meet these requirements.

(a) It is necessary to reliably and quickly receive the square mask carried in while being gripped by the transport arm.

That is, the structure must be such that it is easy to transfer when viewed from the transfer arm side.

(b) Must be handled without touching either the front or the center of the back of the square mask.

(c) It is necessary to sequentially place the square masks that are continuously brought in into the storage cassette, and the faces of the square masks must not come into contact with each other.

(d) Four people must not be shocked by the square mask.

(a) It must be easy to carry in and out the cassette that stores the square masks.

[Purpose of the invention]

In view of the above-mentioned circumstances, the present invention has been made to meet all of the above-mentioned requests (,) to (a), and its purpose is to reliably receive a large number of square masks sequentially from a transfer arm, and to The square masks can be stored in the square mask storage cassette one after another in a quick cycle without touching the center of the back side, without touching the front and back sides of the square masks, and without giving any impact to the square masks. To provide a square mask automatic storage device that allows easy loading and unloading of mask storage cassettes.

[Summary of the invention]

In order to achieve the above objects, there are two apparatuses of the present invention.

A horizontal reference plane is set, a pair of conical roller rows are installed parallel to the reference plane, and a conical roller row is arranged between the pair of conical roller rows and raised above the reference surface.

a mask stand that is driven vertically so as to descend; means for horizontally pushing the mask supported by the pair of conical rollers; and means for supporting the mask storage cassette at a position to receive the pushed mask. The cassette supporting means is characterized in that it is provided with a driving means for vertically moving the cassette in parallel.

[Embodiments of the invention]

Next, the configuration of an embodiment of the present invention will be described with reference to FIGS. 1 to 4.

FIG. 2 is an overall perspective view of this embodiment, and FIG. 1 is a perspective view of the second embodiment.
This is a perspective view of the apparatus of this embodiment in the state shown in the figure with the exterior member removed. 6 Figure 3 is a sectional view taken along the line ■-■ shown in Figure 2, and Figure 4 is the same <
It is a sectional view taken along IV-IV.

1 shown in FIG. 2 is a corner mask, and the horizontal surface on which this corner mask 1 is supported is called a reference surface.

A pair of conical roller rows 2a and 2b are provided to support the square mask 1 on a reference surface. As shown in FIG. 4, this roller array has a structure that can freely rotate around a horizontal axis H--H, and is provided with the apexes of one cone facing each other.

Thereby, the pair of conical roller rows 2a, 2b performs the function of supporting the square mask 1 and guiding it in the horizontal direction without touching either the front or back surface of the square mask 1.

As shown in FIGS. 1 and 2, a mask mounting table 3 is disposed between the pair of conical roller rows 2a and 2b.

As shown in FIG. 3, the mask holder 3 is attached to a mask holder support 5 that is driven up and down by a motor 4, so that it can be driven up and down. 6 is a rack for vertical driving, and 7 is a bearing.

The mask placement table vertical drive means is configured to be able to push the mask placement table upwards above the reference plane or retreat below the reference plane.

As shown in FIG. 2, a pusher 8 is provided for pushing the square mask 1 supported by conical roller rows 2a and 2b. 9 shown in Figure 1
10 is a bushing drive motor, 10 is a bushing wire rope, and 11 is a bushing guide shaft.

As shown in FIG. 2, the cassette 12 is supported at a position to receive the square mask 1 which is pushed by the pusher 8 and conveyed in the direction of arrow F. 13 is a cassette installation table.

The cassette 12 has cassette storage shelves arranged vertically in parallel. 12a is a storage shelf at the top, and 12n is a storage machine at the bottom.

The cassette installation stand 13 has a structure in which it is pitch-fed vertically. When the cassette is at a low position, the uppermost storage shelf 12a directly faces the corner mask 1.

When the cassette is at the highest position, the lowermost storage shelf 12n directly faces the corner mask 1.

Reference numeral 14 shown in FIG. 1 is a motor for driving the cassette up and down.

15 is a cassette vertical drive mechanism.

To use the automatic storage device configured as described above, the mask holder 3 is raised above the reference plane.

In this state, as shown in FIG.
Carry in the corner mask 1 held by a and 16b.

Place it on the mask stand 3. At this time, since the mask mounting table 3 protrudes above the conical roller rows 2a and 2b, it is easy to carry in and place the square mask 1.

Corner mask 1? There is no risk of giving 1j*.

Next, when the mask stand 3 is lowered, the square mask 1 is quietly supported by the conical roller rows 2a and 2b, as shown in FIG.

As shown in FIG. 7, the cassette 12 is moved up and down to an appropriate height.

As shown in FIG. 8, the square mask 1 is gently pushed into the cassette 12 using the pushers 8. At this time, Ma, Sufu stand 3
Since it is descending, it does not interfere with Butsusha 8.

The above-described operation is repeated while pitching the cassette 12 upward or downward, and when a predetermined number of square masks have been stored in the cassette 12, the cassette is replaced with an empty cassette and the same operation is repeated.

It is sufficient to position and place the cassette 12 on the cassette installation table 13.

Its attachment and detachment can be quickly and easily replaced.

〔Effect of the invention〕

As described above in detail, the automatic storage device of the present invention is provided.

A large number of square masks can be reliably received one after another from the transfer arm without touching the front or back sides of the masks or without causing the front and back sides of the square masks to come into contact with each other.

The square masks can be sequentially stored in the square mask storage cassette in a quick cycle without giving an impact, and the square mask storage cassette can be easily carried in and out, which is an excellent practical effect.

[Brief explanation of the drawing]

Figure 1 is a perspective view of an embodiment of the present invention with the exterior removed, Figure 2 is a perspective view with the exterior attached, Figure 3 is a sectional view taken along the line ■-■ in Figure 1, and Figure 4. are the same <IV-IV sectional views. 5 to 8 are explanatory views of the operation of the above embodiment. 1... Square mask, 2a, 2b... Conical roller row,
3...Mask placement stand, 8...Butsusha, 12...Cassette, 13...Cassette installation table. Patent Applicant Hitachi Electronic Engineering Co., Ltd. Representative Patent Attorney Tadashi Akimoto Fig. 1 Fig. 3 Fig. 4 Fig. 5 Ward Fig. 6 Fig. 7 Fig. 8

Claims (1)

[Claims] A horizontal reference surface is set, and a pair of conical roller rows are installed in parallel along the reference surface, and a row of conical rollers is arranged between the pair of conical roller rows and is moved up and down so as to rise and fall from the reference surface. A driven mask mounting stand, means for horizontally pushing the mask supported by the pair of conical rollers, and means for supporting a mask storage cassette at a position for receiving the pushed mask, and . An automatic rectangular mask storage device, characterized in that the cassette supporting means is equipped with a driving means for vertically moving the cassette in parallel.