JPS62122863U - - Google Patents

Info

Publication number
JPS62122863U
JPS62122863U JP864086U JP864086U JPS62122863U JP S62122863 U JPS62122863 U JP S62122863U JP 864086 U JP864086 U JP 864086U JP 864086 U JP864086 U JP 864086U JP S62122863 U JPS62122863 U JP S62122863U
Authority
JP
Japan
Prior art keywords
tray
thermocouple
substrate
sputtering device
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP864086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP864086U priority Critical patent/JPS62122863U/ja
Publication of JPS62122863U publication Critical patent/JPS62122863U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP864086U 1986-01-23 1986-01-23 Pending JPS62122863U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP864086U JPS62122863U (enExample) 1986-01-23 1986-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP864086U JPS62122863U (enExample) 1986-01-23 1986-01-23

Publications (1)

Publication Number Publication Date
JPS62122863U true JPS62122863U (enExample) 1987-08-04

Family

ID=30793204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP864086U Pending JPS62122863U (enExample) 1986-01-23 1986-01-23

Country Status (1)

Country Link
JP (1) JPS62122863U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009013437A (ja) * 2007-06-29 2009-01-22 Fujifilm Corp 基板ホルダ及び真空成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009013437A (ja) * 2007-06-29 2009-01-22 Fujifilm Corp 基板ホルダ及び真空成膜装置

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