JPS62203267U - - Google Patents
Info
- Publication number
- JPS62203267U JPS62203267U JP9265686U JP9265686U JPS62203267U JP S62203267 U JPS62203267 U JP S62203267U JP 9265686 U JP9265686 U JP 9265686U JP 9265686 U JP9265686 U JP 9265686U JP S62203267 U JPS62203267 U JP S62203267U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- substrate
- thermocouple
- pair
- rails
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265686U JPS62203267U (enExample) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265686U JPS62203267U (enExample) | 1986-06-17 | 1986-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203267U true JPS62203267U (enExample) | 1987-12-25 |
Family
ID=30954553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9265686U Pending JPS62203267U (enExample) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203267U (enExample) |
-
1986
- 1986-06-17 JP JP9265686U patent/JPS62203267U/ja active Pending
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