JPS6212282Y2 - - Google Patents

Info

Publication number
JPS6212282Y2
JPS6212282Y2 JP1981071799U JP7179981U JPS6212282Y2 JP S6212282 Y2 JPS6212282 Y2 JP S6212282Y2 JP 1981071799 U JP1981071799 U JP 1981071799U JP 7179981 U JP7179981 U JP 7179981U JP S6212282 Y2 JPS6212282 Y2 JP S6212282Y2
Authority
JP
Japan
Prior art keywords
light
scattering
projector
optical system
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981071799U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57183552U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981071799U priority Critical patent/JPS6212282Y2/ja
Publication of JPS57183552U publication Critical patent/JPS57183552U/ja
Application granted granted Critical
Publication of JPS6212282Y2 publication Critical patent/JPS6212282Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
JP1981071799U 1981-05-18 1981-05-18 Expired JPS6212282Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981071799U JPS6212282Y2 (OSRAM) 1981-05-18 1981-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981071799U JPS6212282Y2 (OSRAM) 1981-05-18 1981-05-18

Publications (2)

Publication Number Publication Date
JPS57183552U JPS57183552U (OSRAM) 1982-11-20
JPS6212282Y2 true JPS6212282Y2 (OSRAM) 1987-03-28

Family

ID=29867589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981071799U Expired JPS6212282Y2 (OSRAM) 1981-05-18 1981-05-18

Country Status (1)

Country Link
JP (1) JPS6212282Y2 (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057284A (OSRAM) * 1973-09-18 1975-05-19

Also Published As

Publication number Publication date
JPS57183552U (OSRAM) 1982-11-20

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