JPS62120347U - - Google Patents

Info

Publication number
JPS62120347U
JPS62120347U JP804186U JP804186U JPS62120347U JP S62120347 U JPS62120347 U JP S62120347U JP 804186 U JP804186 U JP 804186U JP 804186 U JP804186 U JP 804186U JP S62120347 U JPS62120347 U JP S62120347U
Authority
JP
Japan
Prior art keywords
pipe
steam
inert gas
pure water
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP804186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342678Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP804186U priority Critical patent/JPH0342678Y2/ja
Publication of JPS62120347U publication Critical patent/JPS62120347U/ja
Application granted granted Critical
Publication of JPH0342678Y2 publication Critical patent/JPH0342678Y2/ja
Expired legal-status Critical Current

Links

JP804186U 1986-01-23 1986-01-23 Expired JPH0342678Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP804186U JPH0342678Y2 (enrdf_load_stackoverflow) 1986-01-23 1986-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP804186U JPH0342678Y2 (enrdf_load_stackoverflow) 1986-01-23 1986-01-23

Publications (2)

Publication Number Publication Date
JPS62120347U true JPS62120347U (enrdf_load_stackoverflow) 1987-07-30
JPH0342678Y2 JPH0342678Y2 (enrdf_load_stackoverflow) 1991-09-06

Family

ID=30792056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP804186U Expired JPH0342678Y2 (enrdf_load_stackoverflow) 1986-01-23 1986-01-23

Country Status (1)

Country Link
JP (1) JPH0342678Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321836A (ja) * 1986-07-15 1988-01-29 Rohm Co Ltd 半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321836A (ja) * 1986-07-15 1988-01-29 Rohm Co Ltd 半導体製造装置

Also Published As

Publication number Publication date
JPH0342678Y2 (enrdf_load_stackoverflow) 1991-09-06

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