JPS62186421U - - Google Patents

Info

Publication number
JPS62186421U
JPS62186421U JP7545686U JP7545686U JPS62186421U JP S62186421 U JPS62186421 U JP S62186421U JP 7545686 U JP7545686 U JP 7545686U JP 7545686 U JP7545686 U JP 7545686U JP S62186421 U JPS62186421 U JP S62186421U
Authority
JP
Japan
Prior art keywords
inner tube
boat
loaded
wafers
lifting flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7545686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7545686U priority Critical patent/JPS62186421U/ja
Publication of JPS62186421U publication Critical patent/JPS62186421U/ja
Pending legal-status Critical Current

Links

JP7545686U 1986-05-19 1986-05-19 Pending JPS62186421U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7545686U JPS62186421U (enrdf_load_stackoverflow) 1986-05-19 1986-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7545686U JPS62186421U (enrdf_load_stackoverflow) 1986-05-19 1986-05-19

Publications (1)

Publication Number Publication Date
JPS62186421U true JPS62186421U (enrdf_load_stackoverflow) 1987-11-27

Family

ID=30921612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7545686U Pending JPS62186421U (enrdf_load_stackoverflow) 1986-05-19 1986-05-19

Country Status (1)

Country Link
JP (1) JPS62186421U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01194415A (ja) * 1988-01-29 1989-08-04 Kokusai Electric Co Ltd 縦形炉

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128524A (ja) * 1985-11-29 1987-06-10 Deisuko Saiyaa Japan:Kk 多重構造の反応管を持つ縦型半導体熱処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128524A (ja) * 1985-11-29 1987-06-10 Deisuko Saiyaa Japan:Kk 多重構造の反応管を持つ縦型半導体熱処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01194415A (ja) * 1988-01-29 1989-08-04 Kokusai Electric Co Ltd 縦形炉

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