JPS62120340U - - Google Patents

Info

Publication number
JPS62120340U
JPS62120340U JP747186U JP747186U JPS62120340U JP S62120340 U JPS62120340 U JP S62120340U JP 747186 U JP747186 U JP 747186U JP 747186 U JP747186 U JP 747186U JP S62120340 U JPS62120340 U JP S62120340U
Authority
JP
Japan
Prior art keywords
wafers
rows
supporting
furnace core
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP747186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510352Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986007471U priority Critical patent/JPH0510352Y2/ja
Publication of JPS62120340U publication Critical patent/JPS62120340U/ja
Application granted granted Critical
Publication of JPH0510352Y2 publication Critical patent/JPH0510352Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986007471U 1986-01-21 1986-01-21 Expired - Lifetime JPH0510352Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986007471U JPH0510352Y2 (ko) 1986-01-21 1986-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986007471U JPH0510352Y2 (ko) 1986-01-21 1986-01-21

Publications (2)

Publication Number Publication Date
JPS62120340U true JPS62120340U (ko) 1987-07-30
JPH0510352Y2 JPH0510352Y2 (ko) 1993-03-15

Family

ID=30790952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986007471U Expired - Lifetime JPH0510352Y2 (ko) 1986-01-21 1986-01-21

Country Status (1)

Country Link
JP (1) JPH0510352Y2 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114347A (ko) * 1973-02-28 1974-10-31
JPS57167625A (en) * 1980-11-24 1982-10-15 Ee Esu Kiyuu Bootsu Inc Quartz boat for machining semiconductor wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114347A (ko) * 1973-02-28 1974-10-31
JPS57167625A (en) * 1980-11-24 1982-10-15 Ee Esu Kiyuu Bootsu Inc Quartz boat for machining semiconductor wafer

Also Published As

Publication number Publication date
JPH0510352Y2 (ko) 1993-03-15

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