JPS62120340U - - Google Patents
Info
- Publication number
- JPS62120340U JPS62120340U JP747186U JP747186U JPS62120340U JP S62120340 U JPS62120340 U JP S62120340U JP 747186 U JP747186 U JP 747186U JP 747186 U JP747186 U JP 747186U JP S62120340 U JPS62120340 U JP S62120340U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- rows
- supporting
- furnace core
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986007471U JPH0510352Y2 (ko) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986007471U JPH0510352Y2 (ko) | 1986-01-21 | 1986-01-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62120340U true JPS62120340U (ko) | 1987-07-30 |
JPH0510352Y2 JPH0510352Y2 (ko) | 1993-03-15 |
Family
ID=30790952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986007471U Expired - Lifetime JPH0510352Y2 (ko) | 1986-01-21 | 1986-01-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0510352Y2 (ko) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49114347A (ko) * | 1973-02-28 | 1974-10-31 | ||
JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |
-
1986
- 1986-01-21 JP JP1986007471U patent/JPH0510352Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49114347A (ko) * | 1973-02-28 | 1974-10-31 | ||
JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JPH0510352Y2 (ko) | 1993-03-15 |