JPH0390434U - - Google Patents
Info
- Publication number
- JPH0390434U JPH0390434U JP15215889U JP15215889U JPH0390434U JP H0390434 U JPH0390434 U JP H0390434U JP 15215889 U JP15215889 U JP 15215889U JP 15215889 U JP15215889 U JP 15215889U JP H0390434 U JPH0390434 U JP H0390434U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- rod
- shaped bodies
- discharge port
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000006837 decompression Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215889U JPH0390434U (ko) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215889U JPH0390434U (ko) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390434U true JPH0390434U (ko) | 1991-09-13 |
Family
ID=31698433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15215889U Pending JPH0390434U (ko) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390434U (ko) |
-
1989
- 1989-12-28 JP JP15215889U patent/JPH0390434U/ja active Pending