JPH0373430U - - Google Patents
Info
- Publication number
- JPH0373430U JPH0373430U JP13579189U JP13579189U JPH0373430U JP H0373430 U JPH0373430 U JP H0373430U JP 13579189 U JP13579189 U JP 13579189U JP 13579189 U JP13579189 U JP 13579189U JP H0373430 U JPH0373430 U JP H0373430U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- core tube
- furnace core
- holding part
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13579189U JPH0373430U (ko) | 1989-11-21 | 1989-11-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13579189U JPH0373430U (ko) | 1989-11-21 | 1989-11-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0373430U true JPH0373430U (ko) | 1991-07-24 |
Family
ID=31683036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13579189U Pending JPH0373430U (ko) | 1989-11-21 | 1989-11-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0373430U (ko) |
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1989
- 1989-11-21 JP JP13579189U patent/JPH0373430U/ja active Pending