JPS6331528U - - Google Patents
Info
- Publication number
- JPS6331528U JPS6331528U JP12525286U JP12525286U JPS6331528U JP S6331528 U JPS6331528 U JP S6331528U JP 12525286 U JP12525286 U JP 12525286U JP 12525286 U JP12525286 U JP 12525286U JP S6331528 U JPS6331528 U JP S6331528U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- sliding parts
- rails
- grooves
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12525286U JPS6331528U (ko) | 1986-08-18 | 1986-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12525286U JPS6331528U (ko) | 1986-08-18 | 1986-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331528U true JPS6331528U (ko) | 1988-03-01 |
Family
ID=31017991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12525286U Pending JPS6331528U (ko) | 1986-08-18 | 1986-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331528U (ko) |
-
1986
- 1986-08-18 JP JP12525286U patent/JPS6331528U/ja active Pending