JPS6430825U - - Google Patents

Info

Publication number
JPS6430825U
JPS6430825U JP12585987U JP12585987U JPS6430825U JP S6430825 U JPS6430825 U JP S6430825U JP 12585987 U JP12585987 U JP 12585987U JP 12585987 U JP12585987 U JP 12585987U JP S6430825 U JPS6430825 U JP S6430825U
Authority
JP
Japan
Prior art keywords
wafer
pair
supports
groove
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12585987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12585987U priority Critical patent/JPS6430825U/ja
Publication of JPS6430825U publication Critical patent/JPS6430825U/ja
Pending legal-status Critical Current

Links

JP12585987U 1987-08-19 1987-08-19 Pending JPS6430825U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12585987U JPS6430825U (ko) 1987-08-19 1987-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12585987U JPS6430825U (ko) 1987-08-19 1987-08-19

Publications (1)

Publication Number Publication Date
JPS6430825U true JPS6430825U (ko) 1989-02-27

Family

ID=31376836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12585987U Pending JPS6430825U (ko) 1987-08-19 1987-08-19

Country Status (1)

Country Link
JP (1) JPS6430825U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010141221A (ja) * 2008-12-15 2010-06-24 Shin-Etsu Chemical Co Ltd 酸化膜付きシリコン基板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010141221A (ja) * 2008-12-15 2010-06-24 Shin-Etsu Chemical Co Ltd 酸化膜付きシリコン基板の製造方法

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