JPS61164044U - - Google Patents
Info
- Publication number
- JPS61164044U JPS61164044U JP4769185U JP4769185U JPS61164044U JP S61164044 U JPS61164044 U JP S61164044U JP 4769185 U JP4769185 U JP 4769185U JP 4769185 U JP4769185 U JP 4769185U JP S61164044 U JPS61164044 U JP S61164044U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- flat surface
- spacers
- boat
- small diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4769185U JPS61164044U (ko) | 1985-03-30 | 1985-03-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4769185U JPS61164044U (ko) | 1985-03-30 | 1985-03-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61164044U true JPS61164044U (ko) | 1986-10-11 |
Family
ID=30563249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4769185U Pending JPS61164044U (ko) | 1985-03-30 | 1985-03-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61164044U (ko) |
-
1985
- 1985-03-30 JP JP4769185U patent/JPS61164044U/ja active Pending