JPH01104021U - - Google Patents
Info
- Publication number
- JPH01104021U JPH01104021U JP19720887U JP19720887U JPH01104021U JP H01104021 U JPH01104021 U JP H01104021U JP 19720887 U JP19720887 U JP 19720887U JP 19720887 U JP19720887 U JP 19720887U JP H01104021 U JPH01104021 U JP H01104021U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- wafer support
- quartz boat
- longitudinal direction
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19720887U JPH01104021U (ko) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19720887U JPH01104021U (ko) | 1987-12-25 | 1987-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104021U true JPH01104021U (ko) | 1989-07-13 |
Family
ID=31487774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19720887U Pending JPH01104021U (ko) | 1987-12-25 | 1987-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104021U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6290927A (ja) * | 1985-10-17 | 1987-04-25 | Toshiba Ceramics Co Ltd | 半導体ウエ−ハ処理用治具 |
-
1987
- 1987-12-25 JP JP19720887U patent/JPH01104021U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6290927A (ja) * | 1985-10-17 | 1987-04-25 | Toshiba Ceramics Co Ltd | 半導体ウエ−ハ処理用治具 |