JPS6333633U - - Google Patents

Info

Publication number
JPS6333633U
JPS6333633U JP12750486U JP12750486U JPS6333633U JP S6333633 U JPS6333633 U JP S6333633U JP 12750486 U JP12750486 U JP 12750486U JP 12750486 U JP12750486 U JP 12750486U JP S6333633 U JPS6333633 U JP S6333633U
Authority
JP
Japan
Prior art keywords
support member
semiconductor wafer
wafer support
semiconductor
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12750486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12750486U priority Critical patent/JPS6333633U/ja
Publication of JPS6333633U publication Critical patent/JPS6333633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Drying Of Semiconductors (AREA)
JP12750486U 1986-08-20 1986-08-20 Pending JPS6333633U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12750486U JPS6333633U (ko) 1986-08-20 1986-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12750486U JPS6333633U (ko) 1986-08-20 1986-08-20

Publications (1)

Publication Number Publication Date
JPS6333633U true JPS6333633U (ko) 1988-03-04

Family

ID=31022319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12750486U Pending JPS6333633U (ko) 1986-08-20 1986-08-20

Country Status (1)

Country Link
JP (1) JPS6333633U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006086243A (ja) * 2004-09-15 2006-03-30 Shin Etsu Handotai Co Ltd 熱処理用ボート

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006086243A (ja) * 2004-09-15 2006-03-30 Shin Etsu Handotai Co Ltd 熱処理用ボート

Similar Documents

Publication Publication Date Title
JPS6333633U (ko)
JPS62128633U (ko)
JPS624132U (ko)
JPH0415844U (ko)
JPH0459144U (ko)
JPS6196535U (ko)
JPS61119345U (ko)
JPH0381627U (ko)
JPS6336048U (ko)
JPS6289144U (ko)
JPS6424871U (ko)
JPS61124342U (ko)
JPS6333624U (ko)
JPS6310060U (ko)
JPH0313741U (ko)
JPS6333630U (ko)
JPH0183356U (ko)
JPH02106821U (ko)
JPS6429824U (ko)
JPS62178508U (ko)
JPH0487629U (ko)
JPS6171366U (ko)
JPS6342728U (ko)
JPS6258048U (ko)
JPH0231154U (ko)