JPS62119845A - 静電偏向器 - Google Patents

静電偏向器

Info

Publication number
JPS62119845A
JPS62119845A JP60260309A JP26030985A JPS62119845A JP S62119845 A JPS62119845 A JP S62119845A JP 60260309 A JP60260309 A JP 60260309A JP 26030985 A JP26030985 A JP 26030985A JP S62119845 A JPS62119845 A JP S62119845A
Authority
JP
Japan
Prior art keywords
electrodes
electrode
width
distance
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60260309A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0588500B2 (enrdf_load_stackoverflow
Inventor
Akio Ito
昭夫 伊藤
Yoshiaki Goto
後藤　善朗
Kazuyuki Ozaki
一幸 尾崎
Kazuo Okubo
大窪　和生
Toshihiro Ishizuka
俊弘 石塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60260309A priority Critical patent/JPS62119845A/ja
Publication of JPS62119845A publication Critical patent/JPS62119845A/ja
Publication of JPH0588500B2 publication Critical patent/JPH0588500B2/ja
Granted legal-status Critical Current

Links

JP60260309A 1985-11-20 1985-11-20 静電偏向器 Granted JPS62119845A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60260309A JPS62119845A (ja) 1985-11-20 1985-11-20 静電偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60260309A JPS62119845A (ja) 1985-11-20 1985-11-20 静電偏向器

Publications (2)

Publication Number Publication Date
JPS62119845A true JPS62119845A (ja) 1987-06-01
JPH0588500B2 JPH0588500B2 (enrdf_load_stackoverflow) 1993-12-22

Family

ID=17346236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60260309A Granted JPS62119845A (ja) 1985-11-20 1985-11-20 静電偏向器

Country Status (1)

Country Link
JP (1) JPS62119845A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0599584A (ja) * 1991-09-19 1993-04-20 Thermal Components Inc 平行流式熱交換器用のマニホールド組立体
JP2007048805A (ja) * 2005-08-08 2007-02-22 Nuflare Technology Inc 電子ビーム装置
JP2007048806A (ja) * 2005-08-08 2007-02-22 Nuflare Technology Inc 電子ビーム装置
JP2009238780A (ja) * 2008-03-25 2009-10-15 Toshiba Corp 荷電ビーム描画装置
US7692158B2 (en) 2006-03-31 2010-04-06 Kabushiki Kaisha Toshiba Charged beam drawing apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0599584A (ja) * 1991-09-19 1993-04-20 Thermal Components Inc 平行流式熱交換器用のマニホールド組立体
JP2007048805A (ja) * 2005-08-08 2007-02-22 Nuflare Technology Inc 電子ビーム装置
JP2007048806A (ja) * 2005-08-08 2007-02-22 Nuflare Technology Inc 電子ビーム装置
US7692158B2 (en) 2006-03-31 2010-04-06 Kabushiki Kaisha Toshiba Charged beam drawing apparatus
JP2009238780A (ja) * 2008-03-25 2009-10-15 Toshiba Corp 荷電ビーム描画装置

Also Published As

Publication number Publication date
JPH0588500B2 (enrdf_load_stackoverflow) 1993-12-22

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