JPH0588500B2 - - Google Patents
Info
- Publication number
- JPH0588500B2 JPH0588500B2 JP60260309A JP26030985A JPH0588500B2 JP H0588500 B2 JPH0588500 B2 JP H0588500B2 JP 60260309 A JP60260309 A JP 60260309A JP 26030985 A JP26030985 A JP 26030985A JP H0588500 B2 JPH0588500 B2 JP H0588500B2
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic deflector
- electrodes
- deflector
- flat
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60260309A JPS62119845A (ja) | 1985-11-20 | 1985-11-20 | 静電偏向器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60260309A JPS62119845A (ja) | 1985-11-20 | 1985-11-20 | 静電偏向器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62119845A JPS62119845A (ja) | 1987-06-01 |
| JPH0588500B2 true JPH0588500B2 (enrdf_load_stackoverflow) | 1993-12-22 |
Family
ID=17346236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60260309A Granted JPS62119845A (ja) | 1985-11-20 | 1985-11-20 | 静電偏向器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62119845A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5152339A (en) * | 1990-04-03 | 1992-10-06 | Thermal Components, Inc. | Manifold assembly for a parallel flow heat exchanger |
| JP4908799B2 (ja) * | 2005-08-08 | 2012-04-04 | 株式会社ニューフレアテクノロジー | 電子ビーム装置 |
| JP4908800B2 (ja) * | 2005-08-08 | 2012-04-04 | 株式会社ニューフレアテクノロジー | 電子ビーム装置 |
| JP4621621B2 (ja) | 2006-03-31 | 2011-01-26 | 株式会社東芝 | 荷電ビーム描画装置 |
| JP2009238780A (ja) * | 2008-03-25 | 2009-10-15 | Toshiba Corp | 荷電ビーム描画装置 |
-
1985
- 1985-11-20 JP JP60260309A patent/JPS62119845A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62119845A (ja) | 1987-06-01 |
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