JPS62118220A - レ−ザ光のパワ−密度測定方法 - Google Patents

レ−ザ光のパワ−密度測定方法

Info

Publication number
JPS62118220A
JPS62118220A JP25672585A JP25672585A JPS62118220A JP S62118220 A JPS62118220 A JP S62118220A JP 25672585 A JP25672585 A JP 25672585A JP 25672585 A JP25672585 A JP 25672585A JP S62118220 A JPS62118220 A JP S62118220A
Authority
JP
Japan
Prior art keywords
laser beam
measured
power density
measurement control
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25672585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0458891B2 (cs
Inventor
Hideo Masuda
増田　秀雄
Kazuo Matsumoto
和夫 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPC Electronics Corp
Original Assignee
SPC Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPC Electronics Corp filed Critical SPC Electronics Corp
Priority to JP25672585A priority Critical patent/JPS62118220A/ja
Publication of JPS62118220A publication Critical patent/JPS62118220A/ja
Publication of JPH0458891B2 publication Critical patent/JPH0458891B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP25672585A 1985-11-18 1985-11-18 レ−ザ光のパワ−密度測定方法 Granted JPS62118220A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25672585A JPS62118220A (ja) 1985-11-18 1985-11-18 レ−ザ光のパワ−密度測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25672585A JPS62118220A (ja) 1985-11-18 1985-11-18 レ−ザ光のパワ−密度測定方法

Publications (2)

Publication Number Publication Date
JPS62118220A true JPS62118220A (ja) 1987-05-29
JPH0458891B2 JPH0458891B2 (cs) 1992-09-18

Family

ID=17296579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25672585A Granted JPS62118220A (ja) 1985-11-18 1985-11-18 レ−ザ光のパワ−密度測定方法

Country Status (1)

Country Link
JP (1) JPS62118220A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610827U (ja) * 1992-07-09 1994-02-10 株式会社自由電子レーザ研究所 レーザ光および電子ビームの検出器
BE1007005A3 (nl) * 1993-04-16 1995-02-14 Vito Inrichting voor het bepalen van het vermogen van een energieflux.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610827U (ja) * 1992-07-09 1994-02-10 株式会社自由電子レーザ研究所 レーザ光および電子ビームの検出器
BE1007005A3 (nl) * 1993-04-16 1995-02-14 Vito Inrichting voor het bepalen van het vermogen van een energieflux.

Also Published As

Publication number Publication date
JPH0458891B2 (cs) 1992-09-18

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