JPS62114686A - Method for forming transparent conductive film - Google Patents

Method for forming transparent conductive film

Info

Publication number
JPS62114686A
JPS62114686A JP60255650A JP25565085A JPS62114686A JP S62114686 A JPS62114686 A JP S62114686A JP 60255650 A JP60255650 A JP 60255650A JP 25565085 A JP25565085 A JP 25565085A JP S62114686 A JPS62114686 A JP S62114686A
Authority
JP
Japan
Prior art keywords
conductive coating
transparent conductive
film
transparent
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60255650A
Other languages
Japanese (ja)
Other versions
JPH0323229B2 (en
Inventor
Shoji Yoshida
昌二 吉田
Nobumitsu Okazaki
伸光 岡崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honny Chemicals Co Ltd
Original Assignee
Honny Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honny Chemicals Co Ltd filed Critical Honny Chemicals Co Ltd
Priority to JP60255650A priority Critical patent/JPS62114686A/en
Publication of JPS62114686A publication Critical patent/JPS62114686A/en
Publication of JPH0323229B2 publication Critical patent/JPH0323229B2/ja
Granted legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Laminated Bodies (AREA)

Abstract

PURPOSE:To obtain a coating layer having good transparency and reduced in the change of surface resistance, by coating the surface of a transparent base material with a transparent conductive coating composition prepared by dispersing a fine powder of metal oxide in a synthetic resin binder. CONSTITUTION:The surface of a transparent base material comprising polyethylene terephthalate is coated with a film forming component, wherein 85-65pts. wt. of a fine powder of metal oxide (e.g., tin oxide) is compounded with 15-35 pts.wt. of a synthetic resin binder such as polyester or polyurethane, in a form of an org. solvent solution of which the concn. is adjusted to 10-30wt% in a dry film thickness of 0.5-2.0mum by a gravure printer or a roll coater. After the formed film is dried at ambient temp. -60 deg.C, an aqueous dispersion of a polyurethane ionomer is applied to the film and dried at 50-10 deg.C. By this method, a film having good transparency and conductivity can be formed.

Description

【発明の詳細な説明】 (発明の利用分野) 本発明は、透明導電性塗膜の形成方法に関する。[Detailed description of the invention] (Field of application of the invention) The present invention relates to a method for forming a transparent conductive coating.

(従来の技術) 近年、半導体の生産量の増加に伴い、半導体ウェハーの
運搬容器や保存容器、クリーンルームやバイオクリーン
ルームにおける床材、壁材、カーテン等に導電性塗料を
塗布して帯電防止機能を付与し、半導体の静電気による
破壊の防止や、床、壁、カーテン等クリーンルーム内へ
の塵埃の付着の防止等が行われている。
(Conventional technology) In recent years, as the production of semiconductors has increased, conductive paints have been applied to containers for transporting and storing semiconductor wafers, flooring materials, wall materials, curtains, etc. in clean rooms and bio-clean rooms to provide antistatic properties. It is applied to prevent semiconductors from being destroyed by static electricity, and to prevent dust from adhering to floors, walls, curtains, and other surfaces within clean rooms.

これらの目的のため、従来は、カーボン粉末や金属微粉
末を合成樹脂フィルムに練り込んだり、又はこれらの導
電性物質を混入して導電性を持たせた塗料を塗布し導電
性塗膜を形成して、不導体の帯電を防止することが広〈
実施されている。
For these purposes, conventionally, carbon powder or fine metal powder was kneaded into a synthetic resin film, or a conductive paint was applied by mixing these conductive substances to form a conductive coating film. It is widely used to prevent charging of nonconductors.
It has been implemented.

しかしながら、カーボンブラックヤ金属微粉末を合成樹
脂に練り込んで得られるフィルムは、透明性が悪く包装
した後にその内容物を見ることができない、容器内の半
導体ウェハーの個数を光センサーでカウントしようとし
ても不可能であったり、あるいはクリーンルーム内のカ
ーテン越しに向う側の様子を見ようとしても出来ない等
の問題があった。
However, the film obtained by kneading carbon black and metal fine powder into synthetic resin has poor transparency, making it impossible to see the contents after packaging. There were problems such as it being impossible to view the situation on the other side through the curtains in a clean room.

一方、導電性物質を混入してなる導電性塗料を塗布する
方法は、塗膜の色調が灰色または黒色がかるため、被塗
物の色調を損うことになり好ましくなかった。
On the other hand, the method of applying a conductive paint containing a conductive substance is not preferable because the color tone of the coating film becomes gray or blackish, which impairs the color tone of the object to be coated.

このようなフィルムの透明性を改良する導電性塗料に関
しては、例えば、0.2μm以下の粒径を持った導電性
微粉末を、塗膜主要素たる樹脂との割合で5〜50重量
%含有させる塗料(特開昭57 85866@公報参照
)、0.4μm以下の粒径を持った導電性微粉末を50
〜90重間%、塗料主要素たる樹脂95〜10重量%の
割合で含有させる塗料(特開昭58−91777@公報
参照)、1分子中に1個以上のヒドロキシ基を有する、
主鎖が実質的に飽和した炭化水素線状重合体もしくはそ
の変性物を塗膜樹脂とし、この塗膜樹脂に金属酸化物の
微粉末を30〜60重量%配合してなる塗料(特開昭5
9−12256号公報参照)等が知られているが、透明
性改良効果はまだ十分とは言えないものであった。
Regarding conductive paints that improve the transparency of such films, for example, conductive fine powders with a particle size of 0.2 μm or less may be contained in an amount of 5 to 50% by weight relative to the resin, which is the main component of the coating film. 50% of conductive fine powder with a particle size of 0.4 μm or less
~90% by weight, a paint containing 95% to 10% by weight of resin, which is the main component of the paint (see Japanese Patent Application Laid-open No. 58-91777@), having one or more hydroxyl groups in one molecule,
A paint made by using a hydrocarbon linear polymer whose main chain is substantially saturated or a modified product thereof as a coating resin, and blending 30 to 60% by weight of fine metal oxide powder into this coating resin (JP-A-Show) 5
9-12256), but the effect of improving transparency was not yet sufficient.

そこで、透明性改良又は保護のため導電塗料塗布後に導
電物質を含まない塗料をかさね塗りすることが提案され
ている。(特開昭59−136167号公報、特開昭5
9−198607号公報参照)しかし、このような方法
では、塗膜の透明性や強度は改善されるが、塗膜の導電
性が大巾に低下するという欠点があった。
Therefore, it has been proposed to overcoat a paint that does not contain a conductive substance after applying a conductive paint in order to improve transparency or protect it. (Unexamined Japanese Patent Publication No. 59-136167,
(Refer to Japanese Patent Publication No. 9-198607) However, although this method improves the transparency and strength of the coating film, it has the disadvantage that the electrical conductivity of the coating film is significantly reduced.

(本発明が解決しようとする問題点) 本発明の目的は、透明導電性被覆層にかさね塗りしても
表面抵抗の変化が少なくかつ透明性に優れる透明導電性
塗膜の形成方法を提供することにある。
(Problems to be Solved by the Present Invention) An object of the present invention is to provide a method for forming a transparent conductive coating film that exhibits little change in surface resistance and excellent transparency even when coated over a transparent conductive coating layer. There is a particular thing.

(問題を解決するための手段) 本発明を概説すると、透明基材の表面に、導電物質及び
合成樹脂バインダーよりなる透明導電被覆層を形成し、
ついでこの上にイオン架橋結合を有する高分子重合体く
以下、アイオノマーという)の水性分散液を塗布し乾燥
する表面処理を施すことを特徴とする透明導電性塗膜の
形成方法に関する。
(Means for solving the problem) To summarize the present invention, a transparent conductive coating layer made of a conductive substance and a synthetic resin binder is formed on the surface of a transparent base material,
The present invention relates to a method for forming a transparent conductive coating film, which is characterized in that a surface treatment is performed by applying an aqueous dispersion of a high molecular weight polymer (hereinafter referred to as an ionomer) having an ionic cross-linking bond thereon and drying it.

本発明をより詳細に説明すると、透明基材上に形成する
透明導電性被覆層は、合成樹脂バインダー中に導電性物
質である金属酸化物の微粉末を分散してえられる透明導
電性被覆組成物を塗布することにより得られる。
To explain the present invention in more detail, the transparent conductive coating layer formed on the transparent substrate is a transparent conductive coating composition obtained by dispersing fine powder of a metal oxide, which is a conductive substance, in a synthetic resin binder. Obtained by applying a substance.

本発明で使用しうる合成樹脂バインダーとしては、ポリ
エステル、ポリウレタン、アクリル系樹脂、ビニル系樹
脂、エポキシ樹脂、ポリオレフィン系、樹脂等が挙げら
れる。
Examples of the synthetic resin binder that can be used in the present invention include polyester, polyurethane, acrylic resin, vinyl resin, epoxy resin, polyolefin resin, and the like.

一方、導電性物質として使用する金属酸化物としでは、
酸化錫、酸化アンチモン及び酸化インジウムから選ばれ
た少なくとも一種の微粉末を使用する。なお、微粉末の
粒径は小さいほど被覆層の透明性が良好となり好ましい
On the other hand, as a metal oxide used as a conductive material,
At least one type of fine powder selected from tin oxide, antimony oxide, and indium oxide is used. Note that the smaller the particle size of the fine powder, the better the transparency of the coating layer, which is preferable.

この透明導電性被覆組成物は、合成樹脂バインダー15
〜35重量部に対し金属酸化物の微粉末85〜65重量
部の割合で配合し、これを塗膜形成成分とするものであ
る。
This transparent conductive coating composition has a synthetic resin binder of 15
85 to 65 parts by weight of fine metal oxide powder is blended to 35 parts by weight, and this is used as a coating film forming component.

この配合量は、透明導電性被覆層の表面固有抵抗を10
 Ω/口〜108Ω/口の範囲に保つために必要でおり
、金属酸化物が65重量部より少ない場合は、表面抵抗
が増大し十分な帯電防止機能が発揮されず、一方、85
川量部を越えると被覆層の透明性が悪くなり、又基材と
の密着性や強度等が劣るため好ましくない。
This amount increases the surface resistivity of the transparent conductive coating layer by 10
It is necessary to maintain the metal oxide in the range of 108 Ω/mm to 108 Ω/mm, and if the metal oxide is less than 65 parts by weight, the surface resistance increases and sufficient antistatic function is not exhibited.
If the amount exceeds the amount of water, the transparency of the coating layer will deteriorate, and the adhesion and strength to the base material will be deteriorated, which is not preferable.

透明導電性被覆組成物は、適当な樹脂固形分濃度、通常
10〜30@ffi%に調整した有機溶剤溶液の形態で
使用する。
The transparent conductive coating composition is used in the form of an organic solvent solution adjusted to a suitable resin solid content concentration, usually 10 to 30@ffi%.

透明基材への被覆手段としては、グラビアプリンター、
ロールコータ−、リバースロールコータ−、ドクターナ
イフコーター、バーコーター、スプレー、へヶ塗り等が
使用でき、基材表面に乾燥膜厚が0.5〜2.0μmに
なるよう塗布する。
As a means of coating the transparent base material, a gravure printer,
A roll coater, a reverse roll coater, a doctor knife coater, a bar coater, a spray, a spade coater, etc. can be used, and the coating is applied to the surface of the substrate to a dry film thickness of 0.5 to 2.0 μm.

塗布後は、室温〜60℃の温度条件下で塗膜を乾燥させ
る。
After coating, the coating film is dried under a temperature condition of room temperature to 60°C.

本発明は、このように形成された導電性被覆層の上に、
更に次に示すアイオノマーの水性分散液をコーティング
し表面処理する点に特徴を有する。
The present invention provides, on the conductive coating layer formed in this way,
Furthermore, it is characterized in that the surface is treated by coating with an aqueous dispersion of an ionomer as shown below.

この表面処理に使用するアイオノマーとしては、ポリエ
チレン共重合体系アイオノマー、ポリウレタン系アイオ
ノマー、アクリル系アイオノマー、ポリエステル系アイ
オノマー等が挙げられる。
Ionomers used for this surface treatment include polyethylene copolymer ionomers, polyurethane ionomers, acrylic ionomers, polyester ionomers, and the like.

例えば、ポリエチレン共重合体系アイオノマーとしては
、エヂレンにα、β−エヂレン性不飽和カルボン酸また
は/および他の共重合性単量体を重号させ、共重合体の
カルボキシル基の一部をアルカリ金属水酸化物で中和し
水に分散させたものである。このようなエチレン共重合
体の水分散液としては商品名パサーリン″米国デュポン
社装、商品名゛・コーポレンラテックス″旭ダウ社製な
どが市販されている。
For example, as a polyethylene copolymer ionomer, ethylene is superimposed with α, β-edylenically unsaturated carboxylic acid or/and other copolymerizable monomers, and a part of the carboxyl groups of the copolymer is modified with an alkali metal. It is neutralized with hydroxide and dispersed in water. Such aqueous dispersions of ethylene copolymers are commercially available under the trade name of Pasarin, manufactured by DuPont, USA, and under the trade name of Copolene Latex, manufactured by Asahi Dow.

この他、アクリル系アイオノマーとしては、商品名“ネ
オクリル″米国ポリバイニル社製、ウレタン系アイオノ
マーとしては商品名°“ハイトラン″大日本インキ社製
、ポリエステル系アイオノマーとしては商品名゛ファイ
ンテックス″大日本インキ社製などが市販されている。
In addition, acrylic ionomers are available under the trade name "Neocryl" manufactured by Polyvinyl Corporation of the United States, urethane ionomers under the trade name "Hytran" manufactured by Dainippon Ink, and polyester ionomers under the trade name "Finetex" manufactured by Dainippon Ink. Company-made products are commercially available.

本発明では、前記乾燥した導電性被覆層の上に該アイオ
ノマーの水性分散液をコーティングするが、アイオノマ
ーは、樹脂固形分10〜30重量%に調整したものを使
用し、前記の塗布方法から適当な手段を選択しコーティ
ングを行う。
In the present invention, the dried conductive coating layer is coated with an aqueous dispersion of the ionomer. Select appropriate methods for coating.

ついで、これを50〜80’Cで0.5〜1.0分間加
熱乾燥して表面処理を終了するものである。
This is then heated and dried at 50 to 80'C for 0.5 to 1.0 minutes to complete the surface treatment.

(実施例) 以下、本発明を具体的に説明するため実施例を示が、本
発明は、これによりなんら限定されるものではない。な
お、部数は特にことわりのない限り重徂部を示す。
(Examples) Examples are shown below to specifically explain the present invention, but the present invention is not limited thereto. Note that unless otherwise specified, the number of copies refers to the exclusive parts.

実施例1 ポリウレタン(商品名 ハニトップ固形分20重二% 
ハニー化成社製>125部及び酸化錫(商品名 T−I
  三菱金属社製)75部を塗膜形成成分とする透明導
電性被覆組成物(商品名 EX−7220固形分30重
量% ハニー化成社製)をトルエンにより固形分20f
iffi%に調整した。
Example 1 Polyurethane (trade name Honeytop solid content 20%)
Manufactured by Honey Kasei > 125 parts and tin oxide (product name T-I
A transparent conductive coating composition containing 75 parts (manufactured by Mitsubishi Metals Co., Ltd.) as a film-forming component (trade name: EX-7220, solid content 30% by weight, manufactured by Honey Kasei Co., Ltd.) was reduced to a solid content of 20 f with toluene.
Adjusted to iffi%.

これを、ポリエチレンテレフタレートフィル(厚さ20
0μm)にバーコーター(NO2O)で塗布し、60’
Cで5分乾燥した。乾燥膜厚は1μmであり、この被覆
層の表面固有抵抗値は1.5×106Ω/口、ヘーズは
38%の値であった。
Add this to polyethylene terephthalate film (thickness 20
0 μm) with a bar coater (NO2O), and
It was dried at C for 5 minutes. The dry film thickness was 1 μm, the surface resistivity of this coating layer was 1.5×10 6 Ω/mouth, and the haze was 38%.

さらに、この表面にアクリル系アイオノマー(商品名 
ネオクリルA602  米国ポリバイニル社製)の水分
散液(固形分15重量%)をバーコーター(No、6>
で乾燥膜厚1.0μ面となるよう塗膜rrL、50’C
で10分乾燥した。
Furthermore, this surface is coated with acrylic ionomer (trade name).
An aqueous dispersion (solid content 15% by weight) of Neocryl A602 (manufactured by Polyvinyl, USA) was coated with a bar coater (No. 6>
Coat film rrL, 50'C so that the dry film thickness is 1.0μ surface.
and dried for 10 minutes.

表面処理を施した透明導電性フィルムを室温で24時間
静置した後の表面固有抵抗は、3.0×106Ω/口、
ヘーズは8%の値でおった。
The surface specific resistance of the surface-treated transparent conductive film after it was allowed to stand at room temperature for 24 hours was 3.0 x 106Ω/mouth,
The haze was at a value of 8%.

実施例2〜3及び比較例1〜3 実施例1の方法において、アクリル系アイオノマーにか
えて第1表に示す高分子重合体を使用する以外は、すべ
て同じ方法を実施し透明導電性塗膜を形成した。
Examples 2 to 3 and Comparative Examples 1 to 3 The same method as in Example 1 was carried out except that the polymer shown in Table 1 was used instead of the acrylic ionomer, and a transparent conductive coating film was obtained. was formed.

各透明導電性塗膜の表面固有抵抗値、ヘーズ値及び他の
性能は第2表に示す通りでめった。
The surface resistivity, haze value, and other performances of each transparent conductive coating were as shown in Table 2.

ただし、 (1)表面抵抗は、商品名デジタルマルチメーター(ク
ケグ理研社装)により測定した。
However, (1) Surface resistance was measured using a digital multimeter (trade name) (manufactured by Kukegu Riken Co., Ltd.).

(2)ヘーズとは曇価を表わし、 ヘーズー  拡散透過率 X100 全光線透過率 (拡散透過率=仝光線透過率−平行線透過率)で緯出さ
れるものである なおヘーズの値はヘーズメーター(日本重色工業社製)
により測定した。
(2) Haze refers to the haze value, and is calculated as Diffuse Transmittance x 100 Total Light Transmittance (Diffuse Transmittance = Light Transmittance - Parallel Light Transmittance). (manufactured by Nippon Heavy Industries)
It was measured by

以下余白 (発明の効果) 以上の説明から明らかなように、本発明の方法によれば
、透明性に優れ、かつ表面処理によっても表面固有抵抗
の変化が少ない透明導電性塗膜が形成されるのである。
Margin below (effects of the invention) As is clear from the above explanation, according to the method of the present invention, a transparent conductive coating film is formed that has excellent transparency and shows little change in surface resistivity even after surface treatment. It is.

Claims (1)

【特許請求の範囲】 1、透明基材の表面に、導電性物質及び合成樹脂バイン
ダーよりなる透明導電被覆層を形成し、ついでこの上に
イオン架橋結合を有する高分子重合体の水性分散液を塗
布し乾燥する表面処理を施すことを特徴とする透明導電
性塗膜の形成方法。 2、透明導電被覆層は、導電性物質65〜85重量部及
び合成樹脂バインダー35〜15重量部を塗膜形成成分
として含有する導電性被覆組成物を塗布して形成するも
のである特許請求の範囲第1項に記載の透明導電性塗膜
の形成方法。 3、導電性物質が、酸化錫、酸化アンチモン及び酸化イ
ンジウムより選ばれた少なくとも一種の金属酸化物の微
粉末である特許請求の範囲第1項ないし第2項に記載の
透明導電性塗膜の形成方法。 4、合成樹脂バインダーが、ポリエステル、ポリウレタ
ン、アクリル系樹脂、ビニル系樹脂、エポキシ樹脂、ポ
リオレフィン等よりなる群から選ばれた少なくとも一種
である特許請求の範囲第1項ないし第2項に記載の透明
導電性塗膜の形成方法。 5、イオン架橋結合を有する高分子重合体が、゛ポリエ
チレン共重合体系アイオノマー、ポリウレタン系アイオ
ノマー及びポリエステル系アイオノマーよりなる群から
選ばれた少なくとも一種のアイオノマーである特許請求
の範囲第1項に記載の透明導電性塗膜の形成方法。
[Claims] 1. A transparent conductive coating layer made of a conductive substance and a synthetic resin binder is formed on the surface of a transparent base material, and then an aqueous dispersion of a high molecular weight polymer having ionic crosslinks is applied thereon. A method for forming a transparent conductive coating film, which comprises performing a surface treatment by coating and drying. 2. The transparent conductive coating layer is formed by applying a conductive coating composition containing 65 to 85 parts by weight of a conductive substance and 35 to 15 parts by weight of a synthetic resin binder as film-forming components. A method for forming a transparent conductive coating film according to item 1. 3. The transparent conductive coating film according to claims 1 to 2, wherein the conductive substance is a fine powder of at least one metal oxide selected from tin oxide, antimony oxide, and indium oxide. Formation method. 4. The transparent resin according to claim 1 or 2, wherein the synthetic resin binder is at least one selected from the group consisting of polyester, polyurethane, acrylic resin, vinyl resin, epoxy resin, polyolefin, etc. Method for forming a conductive coating. 5. The polymer having ionic crosslinking is at least one ionomer selected from the group consisting of polyethylene copolymer ionomers, polyurethane ionomers, and polyester ionomers, according to claim 1. Method for forming transparent conductive coating.
JP60255650A 1985-11-13 1985-11-13 Method for forming transparent conductive film Granted JPS62114686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60255650A JPS62114686A (en) 1985-11-13 1985-11-13 Method for forming transparent conductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60255650A JPS62114686A (en) 1985-11-13 1985-11-13 Method for forming transparent conductive film

Publications (2)

Publication Number Publication Date
JPS62114686A true JPS62114686A (en) 1987-05-26
JPH0323229B2 JPH0323229B2 (en) 1991-03-28

Family

ID=17281697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60255650A Granted JPS62114686A (en) 1985-11-13 1985-11-13 Method for forming transparent conductive film

Country Status (1)

Country Link
JP (1) JPS62114686A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0655138A (en) * 1991-04-22 1994-03-01 Million Paint Kk Conductive coating layer
WO1999059814A1 (en) * 1998-05-15 1999-11-25 Toyo Boseki Kabushiki Kaisha Transparent conductive film and touch panel
JP2005507327A (en) * 2001-11-01 2005-03-17 イオンフェイズ オサケユキチュア Conductive coating material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0655138A (en) * 1991-04-22 1994-03-01 Million Paint Kk Conductive coating layer
WO1999059814A1 (en) * 1998-05-15 1999-11-25 Toyo Boseki Kabushiki Kaisha Transparent conductive film and touch panel
US6629833B1 (en) 1998-05-15 2003-10-07 Toyo Boseki Kabushiki Kaisha Transparent conductive film and touch panel
JP2005507327A (en) * 2001-11-01 2005-03-17 イオンフェイズ オサケユキチュア Conductive coating material

Also Published As

Publication number Publication date
JPH0323229B2 (en) 1991-03-28

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