JPS6211172U - - Google Patents

Info

Publication number
JPS6211172U
JPS6211172U JP10044185U JP10044185U JPS6211172U JP S6211172 U JPS6211172 U JP S6211172U JP 10044185 U JP10044185 U JP 10044185U JP 10044185 U JP10044185 U JP 10044185U JP S6211172 U JPS6211172 U JP S6211172U
Authority
JP
Japan
Prior art keywords
evaporation
shutter
vacuum
fixed plate
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10044185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143398Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10044185U priority Critical patent/JPH0143398Y2/ja
Publication of JPS6211172U publication Critical patent/JPS6211172U/ja
Application granted granted Critical
Publication of JPH0143398Y2 publication Critical patent/JPH0143398Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10044185U 1985-07-03 1985-07-03 Expired JPH0143398Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10044185U JPH0143398Y2 (cg-RX-API-DMAC7.html) 1985-07-03 1985-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10044185U JPH0143398Y2 (cg-RX-API-DMAC7.html) 1985-07-03 1985-07-03

Publications (2)

Publication Number Publication Date
JPS6211172U true JPS6211172U (cg-RX-API-DMAC7.html) 1987-01-23
JPH0143398Y2 JPH0143398Y2 (cg-RX-API-DMAC7.html) 1989-12-15

Family

ID=30970266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10044185U Expired JPH0143398Y2 (cg-RX-API-DMAC7.html) 1985-07-03 1985-07-03

Country Status (1)

Country Link
JP (1) JPH0143398Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0143398Y2 (cg-RX-API-DMAC7.html) 1989-12-15

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