JPS6211133A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS6211133A
JPS6211133A JP13616085A JP13616085A JPS6211133A JP S6211133 A JPS6211133 A JP S6211133A JP 13616085 A JP13616085 A JP 13616085A JP 13616085 A JP13616085 A JP 13616085A JP S6211133 A JPS6211133 A JP S6211133A
Authority
JP
Japan
Prior art keywords
light
sample plate
photoelectric converter
optical fiber
scattered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13616085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513460B2 (enrdf_load_stackoverflow
Inventor
Izuo Hourai
泉雄 蓬莱
Hideo Oota
英夫 太田
Tsutomu Nakadai
勉 中台
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP13616085A priority Critical patent/JPS6211133A/ja
Publication of JPS6211133A publication Critical patent/JPS6211133A/ja
Publication of JPH0513460B2 publication Critical patent/JPH0513460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP13616085A 1985-06-24 1985-06-24 表面検査装置 Granted JPS6211133A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13616085A JPS6211133A (ja) 1985-06-24 1985-06-24 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13616085A JPS6211133A (ja) 1985-06-24 1985-06-24 表面検査装置

Publications (2)

Publication Number Publication Date
JPS6211133A true JPS6211133A (ja) 1987-01-20
JPH0513460B2 JPH0513460B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=15168718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13616085A Granted JPS6211133A (ja) 1985-06-24 1985-06-24 表面検査装置

Country Status (1)

Country Link
JP (1) JPS6211133A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0631129A1 (de) * 1993-06-22 1994-12-28 Österreichisches Forschungszentrum Seibersdorf Ges.m.b.H. Verfahren und Vorrichtung zur Prüfung von transparenten Gegenständen
EP0735361A3 (en) * 1995-03-31 1998-06-10 LINTEC Corporation Apparatus for inspecting semiconductor substrates

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus
JPS5716324A (en) * 1980-07-04 1982-01-27 Hitachi Ltd Color measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus
JPS5716324A (en) * 1980-07-04 1982-01-27 Hitachi Ltd Color measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0631129A1 (de) * 1993-06-22 1994-12-28 Österreichisches Forschungszentrum Seibersdorf Ges.m.b.H. Verfahren und Vorrichtung zur Prüfung von transparenten Gegenständen
EP0735361A3 (en) * 1995-03-31 1998-06-10 LINTEC Corporation Apparatus for inspecting semiconductor substrates

Also Published As

Publication number Publication date
JPH0513460B2 (enrdf_load_stackoverflow) 1993-02-22

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