JPH0513460B2 - - Google Patents

Info

Publication number
JPH0513460B2
JPH0513460B2 JP60136160A JP13616085A JPH0513460B2 JP H0513460 B2 JPH0513460 B2 JP H0513460B2 JP 60136160 A JP60136160 A JP 60136160A JP 13616085 A JP13616085 A JP 13616085A JP H0513460 B2 JPH0513460 B2 JP H0513460B2
Authority
JP
Japan
Prior art keywords
light
photoelectric converter
sample plate
optical fiber
receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60136160A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211133A (ja
Inventor
Motoo Horai
Hideo Oota
Tsutomu Nakadai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP13616085A priority Critical patent/JPS6211133A/ja
Publication of JPS6211133A publication Critical patent/JPS6211133A/ja
Publication of JPH0513460B2 publication Critical patent/JPH0513460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP13616085A 1985-06-24 1985-06-24 表面検査装置 Granted JPS6211133A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13616085A JPS6211133A (ja) 1985-06-24 1985-06-24 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13616085A JPS6211133A (ja) 1985-06-24 1985-06-24 表面検査装置

Publications (2)

Publication Number Publication Date
JPS6211133A JPS6211133A (ja) 1987-01-20
JPH0513460B2 true JPH0513460B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=15168718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13616085A Granted JPS6211133A (ja) 1985-06-24 1985-06-24 表面検査装置

Country Status (1)

Country Link
JP (1) JPS6211133A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT402860B (de) * 1993-06-22 1997-09-25 Oesterr Forsch Seibersdorf Verfahren und vorrichtung zur prüfung von transparenten gegenständen
TW313626B (enrdf_load_stackoverflow) * 1995-03-31 1997-08-21 Lintec Corp

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus
JPS5716324A (en) * 1980-07-04 1982-01-27 Hitachi Ltd Color measuring device

Also Published As

Publication number Publication date
JPS6211133A (ja) 1987-01-20

Similar Documents

Publication Publication Date Title
WO2020038360A1 (zh) 检测系统
CN209028014U (zh) 检测系统
US6366690B1 (en) Pixel based machine for patterned wafers
US7023954B2 (en) Optical alignment of X-ray microanalyzers
JP2017521653A (ja) インライン型のウェハエッジ検査、ウェハプレアラインメント、及びウェハ洗浄
JPS59227285A (ja) 運動しているシガレツト連続体の表面を光学的に走査するための装置
JP2005539225A5 (enrdf_load_stackoverflow)
US7274445B1 (en) Confocal scatterometer and method for single-sided detection of particles and defects on a transparent wafer or disk
JPH0513460B2 (enrdf_load_stackoverflow)
CN110849898A (zh) 晶圆缺陷检测系统及方法
US10444140B1 (en) Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer system
CN110849900A (zh) 晶圆缺陷检测系统及方法
JPH0228815B2 (enrdf_load_stackoverflow)
JPH11142241A (ja) 分光透過率測定装置
JPH0795040B2 (ja) 微小異物検査装置
JPH04297810A (ja) 光学検査装置
JPH0676970B2 (ja) 光学検査装置
JPH03165300A (ja) Ｘ線分光器検査装置
JPH0613480Y2 (ja) 顕微赤外反射吸収スペクトル測定装置
JPS60214241A (ja) 赤外吸収スペクトル測定装置
JPH02145943A (ja) 限られた微小点部分の反射測定法
JPS5932723B2 (ja) 物体表面の欠点検出装置
JPS61235707A (ja) 膜厚測定装置
JPH08136465A (ja) 板状部材の表面検査装置
JPS6073323A (ja) 光検出装置