JPS62110265U - - Google Patents
Info
- Publication number
- JPS62110265U JPS62110265U JP20281985U JP20281985U JPS62110265U JP S62110265 U JPS62110265 U JP S62110265U JP 20281985 U JP20281985 U JP 20281985U JP 20281985 U JP20281985 U JP 20281985U JP S62110265 U JPS62110265 U JP S62110265U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- plating apparatus
- loading
- unloading port
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007733 ion plating Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20281985U JPS62110265U (cs) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20281985U JPS62110265U (cs) | 1985-12-28 | 1985-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62110265U true JPS62110265U (cs) | 1987-07-14 |
Family
ID=31167559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20281985U Pending JPS62110265U (cs) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62110265U (cs) |
-
1985
- 1985-12-28 JP JP20281985U patent/JPS62110265U/ja active Pending
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