JPS63195567U - - Google Patents
Info
- Publication number
- JPS63195567U JPS63195567U JP8661287U JP8661287U JPS63195567U JP S63195567 U JPS63195567 U JP S63195567U JP 8661287 U JP8661287 U JP 8661287U JP 8661287 U JP8661287 U JP 8661287U JP S63195567 U JPS63195567 U JP S63195567U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- surface treatment
- ring
- holding part
- drive unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8661287U JPS63195567U (cs) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8661287U JPS63195567U (cs) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195567U true JPS63195567U (cs) | 1988-12-15 |
Family
ID=30943079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8661287U Pending JPS63195567U (cs) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195567U (cs) |
-
1987
- 1987-06-05 JP JP8661287U patent/JPS63195567U/ja active Pending