JPH0299959U - - Google Patents
Info
- Publication number
- JPH0299959U JPH0299959U JP665789U JP665789U JPH0299959U JP H0299959 U JPH0299959 U JP H0299959U JP 665789 U JP665789 U JP 665789U JP 665789 U JP665789 U JP 665789U JP H0299959 U JPH0299959 U JP H0299959U
- Authority
- JP
- Japan
- Prior art keywords
- electrode rod
- vapor
- substrate
- vacuum container
- vapor source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP665789U JPH0299959U (cs) | 1989-01-24 | 1989-01-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP665789U JPH0299959U (cs) | 1989-01-24 | 1989-01-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0299959U true JPH0299959U (cs) | 1990-08-09 |
Family
ID=31211008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP665789U Pending JPH0299959U (cs) | 1989-01-24 | 1989-01-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0299959U (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102421933A (zh) * | 2009-05-07 | 2012-04-18 | 韩商Snu精密股份有限公司 | 薄膜沉积装置及其系统 |
| JP2012522137A (ja) * | 2009-03-31 | 2012-09-20 | エスエヌユー プレシジョン カンパニー リミテッド | 薄膜蒸着装置と薄膜蒸着方法及び薄膜蒸着システム |
| JP2013533922A (ja) * | 2010-06-10 | 2013-08-29 | エスエヌユー プレシジョン カンパニー リミテッド | 薄膜蒸着装置及び薄膜蒸着システム |
-
1989
- 1989-01-24 JP JP665789U patent/JPH0299959U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012522137A (ja) * | 2009-03-31 | 2012-09-20 | エスエヌユー プレシジョン カンパニー リミテッド | 薄膜蒸着装置と薄膜蒸着方法及び薄膜蒸着システム |
| CN102421933A (zh) * | 2009-05-07 | 2012-04-18 | 韩商Snu精密股份有限公司 | 薄膜沉积装置及其系统 |
| JP2012526199A (ja) * | 2009-05-07 | 2012-10-25 | エスエヌユー プレシジョン カンパニー リミテッド | 薄膜蒸着装置およびこれを備える薄膜蒸着システム |
| JP2013533922A (ja) * | 2010-06-10 | 2013-08-29 | エスエヌユー プレシジョン カンパニー リミテッド | 薄膜蒸着装置及び薄膜蒸着システム |