JPS62108717A - Production of cubic boron nitride - Google Patents
Production of cubic boron nitrideInfo
- Publication number
- JPS62108717A JPS62108717A JP60247932A JP24793285A JPS62108717A JP S62108717 A JPS62108717 A JP S62108717A JP 60247932 A JP60247932 A JP 60247932A JP 24793285 A JP24793285 A JP 24793285A JP S62108717 A JPS62108717 A JP S62108717A
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- Japan
- Prior art keywords
- boron nitride
- cubic boron
- pyrolytic
- catalyst
- hydride
- Prior art date
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Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は立方晶窒化ほう素の製造方法に関するものであ
る。立方晶窒化ほう素は切削工具インサート、研削砥粒
等の工具材として好適な特性を有することにより注目さ
れている物質である。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for producing cubic boron nitride. Cubic boron nitride is a substance that has attracted attention because it has properties suitable for use as a tool material such as cutting tool inserts and grinding abrasive grains.
(従来の技術)
立方晶窒化ほう素はダイヤモンドに近い硬度を有し、し
かも化学的安定性の点ではダイヤモンドより優れ、例え
ば酸化雰囲気中で高温に耐えるほか、特に鉄族元素との
反応性が著しく小さい等の特性を有し、高速度鋼、ニッ
ケル、コバルトを基質とする耐熱高強度材料を切削およ
び研削する際にダイヤモンドよりはるかに優れた機械的
特性を示す有用な物質として需要が増大しつつある。(Prior art) Cubic boron nitride has a hardness close to that of diamond, and is superior to diamond in terms of chemical stability, for example, it can withstand high temperatures in an oxidizing atmosphere and is particularly reactive with iron group elements. It is in increasing demand as a useful material for cutting and grinding high-speed steel, nickel, and cobalt-based heat-resistant, high-strength materials with mechanical properties far superior to those of diamond. It's coming.
従来の立方晶窒化ほう素の製造方法としては、(イ)
適当な触媒を加えて六方晶窒化ほう素を高温高圧下に処
理する方法(温度:約1400℃以上、圧カニ約45k
bar以上;化学工業(1982) 9月号、55〜5
8頁)。The conventional manufacturing method of cubic boron nitride is (a)
A method in which hexagonal boron nitride is treated under high temperature and pressure by adding an appropriate catalyst (temperature: about 1400℃ or more, pressure crab about 45K)
Over bar; Kagaku Kogyo (1982) September issue, 55-5
(page 8).
(ロ) 触媒を添加せずに六方晶窒化ほう素を直接高温
高圧下に処理する方法(温度: 1600℃以上、好ま
しくは2000〜3000℃、圧カニ 55〜85kb
ar。(b) A method of directly treating hexagonal boron nitride under high temperature and high pressure without adding a catalyst (temperature: 1600°C or higher, preferably 2000 to 3000°C, pressure crab 55 to 85kb)
ar.
好ましくは65〜75kbar ;特開昭55−167
110号公報)。Preferably 65 to 75 kbar; JP-A-167-1987
No. 110).
等が知られている。etc. are known.
(発明が解決しようとする問題点)
しかし、これらの方法には、以下に述べるような問題点
がある。(Problems to be Solved by the Invention) However, these methods have the following problems.
(イ)の方法では(ロ)の方法と比較して、穏やかな高
温高圧条件に立方晶窒化ほう素が製造できるが、得られ
る立方晶窒化ほう素は通常単結晶の粒子である。かかる
単結晶粒子の立方晶窒化ほう素を難削材用研削砥粒とし
て用いる場合には単結晶粒子特有のへき間外のために粒
の破壊が生じやすく、砥石の耐摩耗性の向上が認められ
ない。In method (a), cubic boron nitride can be produced under milder high-temperature and high-pressure conditions than in method (b), but the cubic boron nitride obtained is usually single-crystal particles. When such single-crystal grain cubic boron nitride is used as abrasive grains for hard-to-cut materials, the grains tend to break due to the non-spacing characteristic of single-crystal grains, and the wear resistance of the grindstone is improved. I can't.
添加触媒量を調節することにより、多結晶質立方晶窒化
ほう素が生成する場合があるが、この場合には触媒成分
が不純物として立方晶窒化ほう素中に残留して強度の低
下を拓く。Polycrystalline cubic boron nitride may be produced by adjusting the amount of catalyst added, but in this case, the catalyst component remains as an impurity in the cubic boron nitride, leading to a decrease in strength.
(ロ)の方法では、触媒を使用しない直接変換であるた
め、得られる立方晶窒化ほう素は多結晶質であり、へき
間外がなく、破壊靭性が単結晶に比べて著しく向上し、
砥粒として用いた場合に(イ)の方法で得られる立方晶
窒化ほう素より高い耐摩耗性を示す。しかしながら、例
えば2000〜2300℃、65〜75Kbar等の非
常に厳しい高温高圧処理条件が必要になり、高価な高温
高圧装置の損傷が生じ易く、従って(ロ)の方法は工業
的生産に不適当である。In method (b), since the conversion is direct without using a catalyst, the resulting cubic boron nitride is polycrystalline, has no gaps, and has significantly improved fracture toughness compared to single crystal.
When used as abrasive grains, it exhibits higher wear resistance than cubic boron nitride obtained by method (a). However, very severe high temperature and high pressure processing conditions such as 2000 to 2300°C and 65 to 75 Kbar are required, which tends to damage expensive high temperature and high pressure equipment, and therefore method (b) is unsuitable for industrial production. be.
また、(イ)またはく口)のいずれの方法においても原
料として六方晶窒化ほう素を用いている。Furthermore, in both methods (a) and (b), hexagonal boron nitride is used as a raw material.
通常市販されている六方晶窒化ほう素は酸化硼素(B2
03)を窒化することにより製造されている。このため
5.000〜10.000ppmの酸素を不純物として
含有するのが普通である。このような出発原料中に含ま
れる酸素は、六方晶窒化ほう素から立方晶窒化ほう素へ
の変換を著しく阻害するため、未反応六方晶窒化ほう素
が残留し、これが不均一な立方晶窒化ほう素の生成およ
び立方晶窒化ほう素の収率の低下の原因となる。こうし
た現象を防止するために、原料である六方晶窒化ほう素
を、例えば窒素気流中において2000℃で2時間以上
加熱する等の脱酸素前処理工程が必要になる欠点がある
。Usually commercially available hexagonal boron nitride is boron oxide (B2
03) by nitriding. For this reason, it is common to contain 5.000 to 10.000 ppm of oxygen as an impurity. Since the oxygen contained in such starting materials significantly inhibits the conversion of hexagonal boron nitride to cubic boron nitride, unreacted hexagonal boron nitride remains, which causes uneven cubic nitride. This causes the formation of boron and a decrease in the yield of cubic boron nitride. In order to prevent such a phenomenon, there is a drawback that a deoxidizing pretreatment step such as heating the raw material hexagonal boron nitride at 2000° C. for 2 hours or more in a nitrogen stream is required.
(問題点を解決するための手段)
本発明者等は、従来の立方晶窒化ほう素の製造方法が有
する上述の欠点を解決することを目的に研究を重ね、特
別の前処理を必要とせずに穏やかな高温高圧条件下にお
いて、破壊靭性が高く、耐摩耗性が優れ、かつ残留触媒
を含まない多結晶質立方晶窒化ほう素を高収率で製造す
る方法を見い出した。(Means for Solving the Problems) The present inventors have conducted extensive research with the aim of solving the above-mentioned drawbacks of the conventional manufacturing method of cubic boron nitride, and have achieved We have discovered a method for producing polycrystalline cubic boron nitride in high yield, which has high fracture toughness, excellent wear resistance, and does not contain any residual catalyst under mild conditions of high temperature and high pressure.
本発明は、アルカリ金属またはアルカリ土類金属の水素
化物を触媒として熱分解窒化ほう素に加え、これを立方
晶窒化ほう素の熱力学的安定域内の高温高圧条件下に保
持することにより熱分解窒化ほう素を多結晶質立方晶窒
化ほう素に変換することを特徴とする立方晶窒化ほう素
の製造方法である。The present invention is capable of thermally decomposing boron nitride by adding an alkali metal or alkaline earth metal hydride as a catalyst to thermally decomposing boron nitride and maintaining it under high temperature and high pressure conditions within the thermodynamic stability range of cubic boron nitride. This is a method for producing cubic boron nitride, which is characterized by converting boron nitride into polycrystalline cubic boron nitride.
本発明で用いる熱分解窒化ほう素は、化学気相蒸着力(
CVD法)と呼ばれる特別なm4方法で合成される高配
向性の窒化ほう素である。CVD法による熱分解窒化ほ
う素の合成は、例えば米国特許第3.152.006号
に開示されているように、三塩化ほう素のようなハロゲ
ン化ほう素とアンモニアとを気体状原料とし、温度14
50℃〜2300℃、圧力50Torr以下の条件下に
おいて、適当な基材表面上に窒ほう素を気+目から析出
させることにより達成され、熱分解窒化ほう素は厚さ数
mm程度の板等として市販されている。The pyrolytic boron nitride used in the present invention has a chemical vapor deposition strength (
It is a highly oriented boron nitride synthesized by a special m4 method called (CVD method). Synthesis of pyrolytic boron nitride by the CVD method uses a boron halide such as boron trichloride and ammonia as gaseous raw materials, as disclosed in U.S. Pat. No. 3,152,006, for example. temperature 14
This is achieved by depositing nitrogen and boron on the surface of a suitable substrate under conditions of 50°C to 2300°C and a pressure of 50 Torr or less. It is commercially available as.
このような熱分解窒化ほう素は、その製造工程において
酸素または酸化物を全く必要とせず、極めて高純度のも
のが製造可能であり、しかも熱分解窒化ほう素自体も空
気中で極めて安定で、市販の六方晶窒化ほう素粉末に見
られる表面酸化現象が無視できるので、特別な処理およ
び取扱いを行わなくても常に酸素含有量の極めて少ない
窒化ほう素であると見なすことができる。Such pyrolytic boron nitride does not require any oxygen or oxides in its manufacturing process, and can be produced with extremely high purity.Moreover, pyrolytic boron nitride itself is extremely stable in air. Since the surface oxidation phenomenon observed in commercially available hexagonal boron nitride powders can be ignored, it can always be considered as boron nitride with extremely low oxygen content even without special treatment and handling.
市販の熱分解窒化ほう素は板状成型体であるが、柔軟性
に富み容易に粉砕できる。次いで、熱分解窒化ほう素粉
末を触媒であるアルカリ金属またはアルカリ土類金属の
水素化物の粉末と混合する。Commercially available pyrolytic boron nitride is a plate-shaped molded product, but it is highly flexible and can be easily crushed. The pyrolytic boron nitride powder is then mixed with alkali metal or alkaline earth metal hydride powder as a catalyst.
アルカリ金属またはアルカリ土類金属の水素化物として
は、例えば水素化リチウム(LiH) 、水素化ナトリ
ウム(Nail)、水素化力ルンウム(CaL)、水素
化バリウム(BaH2)等がある。Examples of hydrides of alkali metals or alkaline earth metals include lithium hydride (LiH), sodium hydride (Nail), hydride (CaL), and barium hydride (BaH2).
触媒の混合割合は、原料である熱分解窒化ほう素に対し
て0.1モル%以上であることが必要である。0.1モ
ル%未満では、立方晶窒化ほう素への変換が完全には行
なわれない。触媒はあまり多く添加しても効果の増大は
認められず、最大でも10モル%程度で十分である。The mixing ratio of the catalyst needs to be 0.1 mol % or more based on the pyrolytic boron nitride that is the raw material. If the amount is less than 0.1 mol %, the conversion to cubic boron nitride will not be complete. Even if too much catalyst is added, no increase in effect is observed, and a maximum of about 10 mol % is sufficient.
このようにして得た触媒含有熱分解窒化ほう素粉末を出
発原料として熱分解窒化ほう素から立方晶窒化ほう素へ
の変換を行うと、従来の立方晶窒化ほう素合成法には見
られない種々の利点が得られる。まず、通常の六方晶窒
化ほう素を原料とした場合と異なり、触媒の存在下にお
いても多結晶質立方晶窒化ほう素が生成する。この場合
、触媒添加量を厳密に調節しなくても、生成する立方晶
窒化ほう素は多結晶質であり、粒子破壊の原因となる触
媒の残留も殆ど認められない。この理由は明らかではな
いが、通常の六方晶窒化ほう素と熱分解窒化ほう素とで
は生成機構が異なり、これに起因する微構造の差異が、
変換後の立方晶窒化ほう素の微構造に反映されたものと
考えられる。また、出発原料が立方晶窒化ほう素変換触
媒を含んでいるので立方晶窒化ほう素への変換に必要な
高温高圧条件も立方晶窒化ほう素の熱力学的安定域にお
ける穏やかな条件、例えば1450〜1500℃、45
〜50Kbarでよい。従って、本発明方法では、従来
から知られている六方晶窒化ほう素を触媒無添加で直接
高温高圧条件下に処理する場合に必要な条件、例えば2
000〜2300℃、 65〜75Kbarよりはるか
に穏やかな条件下に多結晶質立方晶窒化ほう素が生成す
る。従って高温高圧装置の損傷が生じにくく、装置の長
寿命化が可能となり、工業的生産性を著しく改善するこ
とができる。さらに、本発明における出発原料である熱
分解窒化ほう素は、その製造工程において酸素または酸
化物が全く介在せず、熱分解窒化ほう素自体も空気中に
おける安定性および耐酸化性に優れているので、酸素含
有量が極めて低く、出発原料として通常の六方晶窒化ほ
う素を使用する場合に必要な脱酸素前処理工程を必要と
せずに立方晶窒化ほう素が高収率で得られる利点がある
。Using the catalyst-containing pyrolytic boron nitride powder obtained in this way as a starting material, pyrolytic boron nitride is converted to cubic boron nitride, which is not found in conventional cubic boron nitride synthesis methods. Various advantages can be obtained. First, unlike when normal hexagonal boron nitride is used as a raw material, polycrystalline cubic boron nitride is produced even in the presence of a catalyst. In this case, even if the amount of catalyst added is not strictly controlled, the cubic boron nitride produced is polycrystalline, and there is hardly any residual catalyst that could cause particle destruction. The reason for this is not clear, but the formation mechanism is different between ordinary hexagonal boron nitride and pyrolytic boron nitride, and the difference in microstructure caused by this is due to
This is thought to be reflected in the microstructure of cubic boron nitride after conversion. In addition, since the starting material contains a catalyst for converting cubic boron nitride, the high temperature and high pressure conditions required for conversion to cubic boron nitride can be changed to mild conditions in the thermodynamic stability range of cubic boron nitride, such as 1450 ~1500℃, 45
~50Kbar is sufficient. Therefore, in the method of the present invention, the conditions required when conventionally known hexagonal boron nitride is directly treated under high temperature and high pressure conditions without adding a catalyst, such as 2
Polycrystalline cubic boron nitride is produced under much milder conditions than 000-2300°C and 65-75 Kbar. Therefore, the high temperature and high pressure equipment is less likely to be damaged, the life of the equipment can be extended, and industrial productivity can be significantly improved. Furthermore, pyrolytic boron nitride, which is the starting material in the present invention, does not contain any oxygen or oxides during its manufacturing process, and pyrolytic boron nitride itself has excellent stability in air and oxidation resistance. Therefore, the oxygen content is extremely low, and the advantage is that cubic boron nitride can be obtained in high yield without the need for the deoxidizing pretreatment process that is required when using ordinary hexagonal boron nitride as a starting material. be.
本発明においては、出発原料の脱酸素前処理を行う必要
がなく、立方晶窒化ほう素の熱力学的安定域内の工業生
産上有利な穏やかな高温高圧条件下において、破壊靭性
が高(、耐摩耗性が優れ、かつ残留触媒を含まない多結
晶質立方晶窒化ほう素を高収率で得ることができ、しか
もf4られる多結晶質立方晶窒化ほう素は難研材研削用
砥粒として適切な特性を有するものである。In the present invention, there is no need to perform deoxidation pretreatment of the starting material, and the fracture toughness (and resistance to It is possible to obtain polycrystalline cubic boron nitride with excellent abrasive properties and no residual catalyst in a high yield, and the polycrystalline cubic boron nitride that can be processed into F4 is suitable as an abrasive grain for grinding difficult-to-grind materials. It has certain characteristics.
(実施例) 以下に本発明を実施例および比較例について説明する。(Example) The present invention will be described below with reference to Examples and Comparative Examples.
実施例1
市販されている1mm厚の熱分解窒化ほう素を振動ミル
で粉砕して平均粒径約1μmの熱分解窒化ほう素粉末を
得た。この熱分解窒化ほう素粉末の純度は99.9重量
%以上で極めて高純度であった。Example 1 A commercially available pyrolytic boron nitride having a thickness of 1 mm was ground using a vibration mill to obtain a pyrolytic boron nitride powder having an average particle size of about 1 μm. The purity of this pyrolytic boron nitride powder was 99.9% by weight or more, which was extremely high purity.
この粉末を水素化リチウム(LiH)粉末と混合し、ペ
レット状に成型したものを、ベルト型高温高圧装置内に
おいて温度1450℃、圧力45Kbarの条件下に9
0分間保持し、立方晶窒化ほう素を得た。得られた立方
晶窒化ほう素について、X線回折による生成相の同定、
化学分析による残留触媒成分の定最、電子顕微鏡による
粒径の測定および微構造の観察を行った。これらの結果
を表1に示す。This powder was mixed with lithium hydride (LiH) powder and formed into pellets, which were placed in a belt-type high-temperature, high-pressure device at a temperature of 1450°C and a pressure of 45 Kbar for 90 minutes.
The mixture was held for 0 minutes to obtain cubic boron nitride. Identification of the formed phase of the obtained cubic boron nitride by X-ray diffraction,
The residual catalyst components were determined by chemical analysis, the particle size was measured using an electron microscope, and the microstructure was observed. These results are shown in Table 1.
さらに、この立方晶窒化ほう素粒子に約50重量%のニ
ッケルメッキを施し、さらに80/100メツシユにふ
るい分けたものを用いてレジンボンド砥石を製造し、湿
式平面研削を行い、研削比を求めた。Furthermore, the cubic boron nitride particles were plated with approximately 50% nickel by weight, and then sieved to an 80/100 mesh to produce a resin bonded grindstone, subjected to wet surface grinding, and the grinding ratio was determined. .
この結果を表1に示す。また、砥石の製造条件および研
削条件を表2に示す。The results are shown in Table 1. In addition, Table 2 shows the manufacturing conditions and grinding conditions for the grindstone.
実施例2
実施例1と同一の熱分解窒化ほう素粉末に、水素化カル
シウム(CaH2)粉末を混合し、ペレット状に成型し
たものを実施例1と同一の条件で高温高圧処理して、立
方晶窒化ほう素を得た。得られた立方晶窒化ほう素につ
いて、実施例1と同様にして、生成相の同定、粒径の測
定および微構造の観察を行った。さらに、実施例1と同
様にしてレジンボンド砥石を製造し、実施例1と同一の
条件下に研削試験を行った。これらの結果を表1に示す
。Example 2 Calcium hydride (CaH2) powder was mixed with the same pyrolytic boron nitride powder as in Example 1 and formed into pellets, which was then treated at high temperature and pressure under the same conditions as in Example 1 to form a cube. Crystalline boron nitride was obtained. Regarding the obtained cubic boron nitride, the produced phase was identified, the particle size was measured, and the microstructure was observed in the same manner as in Example 1. Furthermore, a resin bonded grindstone was manufactured in the same manner as in Example 1, and a grinding test was conducted under the same conditions as in Example 1. These results are shown in Table 1.
比較例
市販の高札度六方品窒化ほう素粉末で平均粒径約1μm
のものを1気圧の窒素ガス雰囲気内で1950℃の温度
に5時間曝して酸素含有量が2重量%以下の六方晶窒化
ほう素粉末を得た。この粉末にLiH粉末を混合し、ペ
レット状に成型したものを実施例と同一の装置において
同一の温度、圧力条件下に保持し、立方晶窒化ほう素を
1等だ。得られた立方晶窒化ほう素に関して、実施例と
同様にして生成相の同定、残留触媒成分の定量、粒径の
測定および微構造の観察を行った。さらに実施例と同一
の条件で研削試験を行った。これらの結果を表1に示す
。Comparative example Commercially available high grade hexagonal boron nitride powder with average particle size of approximately 1 μm.
The product was exposed to a temperature of 1950° C. for 5 hours in a nitrogen gas atmosphere of 1 atm to obtain a hexagonal boron nitride powder having an oxygen content of 2% by weight or less. This powder was mixed with LiH powder, molded into pellets, and kept under the same temperature and pressure conditions in the same apparatus as in the example, and cubic boron nitride was used as a first-grade cubic boron nitride. Regarding the obtained cubic boron nitride, identification of the generated phase, quantitative determination of residual catalyst components, measurement of particle size, and observation of microstructure were performed in the same manner as in Examples. Furthermore, a grinding test was conducted under the same conditions as in the example. These results are shown in Table 1.
なお、表1において、微構造に晶癖のないことは破壊靭
性が高いことを意味し、研削比が大きいことは耐摩耗性
に優れ、研石砥粒用砥粒等の工具材への応用に適してい
ることを意味する。In addition, in Table 1, the absence of crystal habit in the microstructure means high fracture toughness, and the high grinding ratio means excellent wear resistance, which makes it suitable for application to tool materials such as abrasive grains for grinding wheels. means it is suitable for
;発明の効果)
本発明によれば、破壊靭性が高く、耐摩耗性の涜れた多
結晶質立方晶窒化ほう素が得られ、従っ二生成する立方
晶窒化ほう素は研削砥石用砥粒等〕工具材への応用に適
している。特に本発明では泊来の製造方法とは異なり、
出発原料として熱分l窒化ほう素を用いているので出発
原料の脱酸素」処理工程が不要であり、しかも立方晶窒
化ほうj変換触媒の添加により、従来の多結晶質立方晶
1化ほう素の製造条件よりはるかに穏やかな高温]圧条
件下に多結晶質立方晶窒化ほう素を製造でるため、高温
高圧装置の損傷が生じに<(、装での長寿命化が可能と
なり、工業的生産性が著し改善される利点がある。; Effects of the invention) According to the present invention, polycrystalline cubic boron nitride with high fracture toughness and poor wear resistance can be obtained, and therefore the cubic boron nitride produced can be used as abrasive grains for grinding wheels. etc.] Suitable for application to tool materials. In particular, in the present invention, unlike the production method used by Tomari,
Since hot boron nitride is used as the starting material, there is no need for a process of deoxidizing the starting material.Moreover, by adding a cubic boron nitride conversion catalyst, it is possible to convert the conventional polycrystalline cubic boron nitride into Polycrystalline cubic boron nitride is manufactured under conditions of high temperature and pressure, which are much milder than the manufacturing conditions of This has the advantage of significantly improving productivity.
Claims (1)
触媒として熱分解窒化ほう素に加え、これを立方晶窒化
ほう素の熱力学的安定域内の高温高圧条件下に保持する
ことにより熱分解窒化ほう素を多結晶質立方晶窒化ほう
素に変換することを特徴とする立方晶窒化ほう素の製造
方法。 2、上記熱分解窒化ほう素の純度が99.9重量%以上
である特許請求の範囲第1項記載の方法。[Claims] 1. Adding an alkali metal or alkaline earth metal hydride as a catalyst to pyrolyzed boron nitride and maintaining it under high temperature and high pressure conditions within the thermodynamic stability range of cubic boron nitride. A method for producing cubic boron nitride, comprising converting pyrolytic boron nitride into polycrystalline cubic boron nitride. 2. The method according to claim 1, wherein the pyrolytic boron nitride has a purity of 99.9% by weight or more.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60247932A JPS62108717A (en) | 1985-11-07 | 1985-11-07 | Production of cubic boron nitride |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60247932A JPS62108717A (en) | 1985-11-07 | 1985-11-07 | Production of cubic boron nitride |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62108717A true JPS62108717A (en) | 1987-05-20 |
Family
ID=17170696
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60247932A Pending JPS62108717A (en) | 1985-11-07 | 1985-11-07 | Production of cubic boron nitride |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62108717A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100487145B1 (en) * | 1996-05-21 | 2005-08-04 | 쇼와 덴코 가부시키가이샤 | Manufacturing method of cubic boron nitride |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5433510A (en) * | 1977-07-01 | 1979-03-12 | Gen Electric | Cubic boronnnitride compressed body and method of making same |
US4289503A (en) * | 1979-06-11 | 1981-09-15 | General Electric Company | Polycrystalline cubic boron nitride abrasive and process for preparing same in the absence of catalyst |
JPS5815012A (en) * | 1981-07-22 | 1983-01-28 | Ishizuka Kenkyusho:Kk | Manufacture of cubic system boron nitride |
JPS6018624A (en) * | 1983-07-13 | 1985-01-30 | Matsushita Electric Ind Co Ltd | Motor driving device with clutch |
JPS6077110A (en) * | 1983-10-05 | 1985-05-01 | Showa Denko Kk | Synthesis of cubic boron nitride |
JPS60204607A (en) * | 1984-03-30 | 1985-10-16 | Toshiba Tungaloy Co Ltd | Synthesis of cubic boron nitride crystal |
-
1985
- 1985-11-07 JP JP60247932A patent/JPS62108717A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5433510A (en) * | 1977-07-01 | 1979-03-12 | Gen Electric | Cubic boronnnitride compressed body and method of making same |
US4289503A (en) * | 1979-06-11 | 1981-09-15 | General Electric Company | Polycrystalline cubic boron nitride abrasive and process for preparing same in the absence of catalyst |
JPS5815012A (en) * | 1981-07-22 | 1983-01-28 | Ishizuka Kenkyusho:Kk | Manufacture of cubic system boron nitride |
JPS6018624A (en) * | 1983-07-13 | 1985-01-30 | Matsushita Electric Ind Co Ltd | Motor driving device with clutch |
JPS6077110A (en) * | 1983-10-05 | 1985-05-01 | Showa Denko Kk | Synthesis of cubic boron nitride |
JPS60204607A (en) * | 1984-03-30 | 1985-10-16 | Toshiba Tungaloy Co Ltd | Synthesis of cubic boron nitride crystal |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100487145B1 (en) * | 1996-05-21 | 2005-08-04 | 쇼와 덴코 가부시키가이샤 | Manufacturing method of cubic boron nitride |
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