JPS62104436U - - Google Patents

Info

Publication number
JPS62104436U
JPS62104436U JP19722885U JP19722885U JPS62104436U JP S62104436 U JPS62104436 U JP S62104436U JP 19722885 U JP19722885 U JP 19722885U JP 19722885 U JP19722885 U JP 19722885U JP S62104436 U JPS62104436 U JP S62104436U
Authority
JP
Japan
Prior art keywords
side electrode
high frequency
reaction
frequency side
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19722885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530353Y2 (id
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985197228U priority Critical patent/JPH0530353Y2/ja
Publication of JPS62104436U publication Critical patent/JPS62104436U/ja
Application granted granted Critical
Publication of JPH0530353Y2 publication Critical patent/JPH0530353Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP1985197228U 1985-12-20 1985-12-20 Expired - Lifetime JPH0530353Y2 (id)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985197228U JPH0530353Y2 (id) 1985-12-20 1985-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985197228U JPH0530353Y2 (id) 1985-12-20 1985-12-20

Publications (2)

Publication Number Publication Date
JPS62104436U true JPS62104436U (id) 1987-07-03
JPH0530353Y2 JPH0530353Y2 (id) 1993-08-03

Family

ID=31156761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985197228U Expired - Lifetime JPH0530353Y2 (id) 1985-12-20 1985-12-20

Country Status (1)

Country Link
JP (1) JPH0530353Y2 (id)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143596A (ja) * 1982-02-22 1983-08-26 Toshiba Corp 化合物半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143596A (ja) * 1982-02-22 1983-08-26 Toshiba Corp 化合物半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0530353Y2 (id) 1993-08-03

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