JPS62104436U - - Google Patents
Info
- Publication number
- JPS62104436U JPS62104436U JP19722885U JP19722885U JPS62104436U JP S62104436 U JPS62104436 U JP S62104436U JP 19722885 U JP19722885 U JP 19722885U JP 19722885 U JP19722885 U JP 19722885U JP S62104436 U JPS62104436 U JP S62104436U
- Authority
- JP
- Japan
- Prior art keywords
- side electrode
- high frequency
- reaction
- frequency side
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985197228U JPH0530353Y2 (id) | 1985-12-20 | 1985-12-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985197228U JPH0530353Y2 (id) | 1985-12-20 | 1985-12-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62104436U true JPS62104436U (id) | 1987-07-03 |
JPH0530353Y2 JPH0530353Y2 (id) | 1993-08-03 |
Family
ID=31156761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985197228U Expired - Lifetime JPH0530353Y2 (id) | 1985-12-20 | 1985-12-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0530353Y2 (id) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58143596A (ja) * | 1982-02-22 | 1983-08-26 | Toshiba Corp | 化合物半導体装置の製造方法 |
-
1985
- 1985-12-20 JP JP1985197228U patent/JPH0530353Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58143596A (ja) * | 1982-02-22 | 1983-08-26 | Toshiba Corp | 化合物半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0530353Y2 (id) | 1993-08-03 |
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