JPS6210438U - - Google Patents
Info
- Publication number
- JPS6210438U JPS6210438U JP10238685U JP10238685U JPS6210438U JP S6210438 U JPS6210438 U JP S6210438U JP 10238685 U JP10238685 U JP 10238685U JP 10238685 U JP10238685 U JP 10238685U JP S6210438 U JPS6210438 U JP S6210438U
- Authority
- JP
- Japan
- Prior art keywords
- waste liquid
- concentration
- concentration detector
- discharge hole
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 239000002699 waste material Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10238685U JPS6210438U (de) | 1985-07-04 | 1985-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10238685U JPS6210438U (de) | 1985-07-04 | 1985-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6210438U true JPS6210438U (de) | 1987-01-22 |
Family
ID=30973988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10238685U Pending JPS6210438U (de) | 1985-07-04 | 1985-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6210438U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0871494A (ja) * | 1994-08-31 | 1996-03-19 | Mitsubishi Chem Corp | 色素溶液の自動調製方法 |
-
1985
- 1985-07-04 JP JP10238685U patent/JPS6210438U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0871494A (ja) * | 1994-08-31 | 1996-03-19 | Mitsubishi Chem Corp | 色素溶液の自動調製方法 |
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