JPS6210438U - - Google Patents
Info
- Publication number
- JPS6210438U JPS6210438U JP10238685U JP10238685U JPS6210438U JP S6210438 U JPS6210438 U JP S6210438U JP 10238685 U JP10238685 U JP 10238685U JP 10238685 U JP10238685 U JP 10238685U JP S6210438 U JPS6210438 U JP S6210438U
- Authority
- JP
- Japan
- Prior art keywords
- waste liquid
- concentration
- concentration detector
- discharge hole
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 239000002699 waste material Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案に係る半導体製造装置の一実施
例を示す正断面図、第２図は第１図の装置による
高濃度廃液の排水時の状態を示す正断面図、第３
図は第１図の装置による低濃度廃液の排水時の状
態を示す正断面図である。第４図は本考案の前提
となる半導体製造装置を示す正断面図である。
６…半導体ウエーハ、７…廃液回収槽、７ａ…
底部、８…排出孔、９ａ，９ｂ…２系統の配管系
〔第１、第２の排出管〕、１０…濃度検出器〔ｐ
Ｈ測定器〕、１１ａ，１１ｂ…自動切換弁〔第１
、第２の電磁弁〕。
FIG. 1 is a front sectional view showing an embodiment of a semiconductor manufacturing apparatus according to the present invention, FIG.
The figure is a front cross-sectional view showing the state when low concentration waste liquid is drained by the apparatus of FIG. 1. FIG. 4 is a front sectional view showing a semiconductor manufacturing apparatus which is the premise of the present invention. 6... Semiconductor wafer, 7... Waste liquid recovery tank, 7a...
Bottom, 8...Discharge hole, 9a, 9b...2 piping system [first, second discharge pipe], 10...Concentration detector [p
H measuring device], 11a, 11b... automatic switching valve [first
, second solenoid valve].
Claims (1)
持する回転テーブルと、 該回転テーブルの周囲を囲繞するように設置さ
れた廃液回収槽と、 該廃液回収槽の底部に設けられた排出孔と連通
する２系統の配管系と、 上記排出孔から廃棄される処理液を含んだ廃液
の濃度を検出する濃度検出器と、 上記配管系に設けられ、濃度検出器で検知され
た廃液濃度に基づいて配管系への廃液の流入を切
換える自動切換弁とを具備したことを特徴とする
半導体製造装置。[Scope of Claim for Utility Model Registration] A rotary table that holds a semiconductor wafer whose surface is coated with a processing liquid, a waste liquid collection tank installed around the rotary table, and a bottom part of the waste liquid collection tank. two piping systems communicating with the provided discharge hole; a concentration detector that detects the concentration of waste liquid containing the treated liquid disposed of from the discharge hole; and a concentration detector provided in the piping system and detected by the concentration detector. 1. A semiconductor manufacturing device comprising: an automatic switching valve that switches the flow of waste liquid into a piping system based on the concentration of the waste liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10238685U JPS6210438U (en) | 1985-07-04 | 1985-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10238685U JPS6210438U (en) | 1985-07-04 | 1985-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6210438U true JPS6210438U (en) | 1987-01-22 |
Family
ID=30973988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10238685U Pending JPS6210438U (en) | 1985-07-04 | 1985-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6210438U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0871494A (en) * | 1994-08-31 | 1996-03-19 | Mitsubishi Chem Corp | Automatic preparation of dyestuff solution |
-
1985
- 1985-07-04 JP JP10238685U patent/JPS6210438U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0871494A (en) * | 1994-08-31 | 1996-03-19 | Mitsubishi Chem Corp | Automatic preparation of dyestuff solution |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6179259U (en) | ||
| JPS6210438U (en) | ||
| JPS6291187U (en) | ||
| JPS6410073U (en) | ||
| JPH0237736U (en) | ||
| JPH0336130U (en) | ||
| JPS60119906U (en) | Strainer device for solar water heaters | |
| JPS6338051U (en) | ||
| JPS63133389U (en) | ||
| JPS5858845U (en) | Electrostatic liquid purification device | |
| JPH0198998U (en) | ||
| JPS61194694U (en) | ||
| JPS6296573U (en) | ||
| JPH0272532U (en) | ||
| JPS63122700U (en) | ||
| JPH01116435U (en) | ||
| JPS61155348U (en) | ||
| JPS6388740U (en) | ||
| JPS6170771U (en) | ||
| JPH034295U (en) | ||
| JPS62187620U (en) | ||
| JPS62184181U (en) | ||
| JPS62106606U (en) | ||
| JPS6182276U (en) | ||
| JPH01154666U (en) |