JPH0192133U - - Google Patents
Info
- Publication number
- JPH0192133U JPH0192133U JP18871387U JP18871387U JPH0192133U JP H0192133 U JPH0192133 U JP H0192133U JP 18871387 U JP18871387 U JP 18871387U JP 18871387 U JP18871387 U JP 18871387U JP H0192133 U JPH0192133 U JP H0192133U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- washing
- cooling coil
- processing
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002351 wastewater Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
Landscapes
- Weting (AREA)
- Sewage (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18871387U JPH0192133U (de) | 1987-12-10 | 1987-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18871387U JPH0192133U (de) | 1987-12-10 | 1987-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192133U true JPH0192133U (de) | 1989-06-16 |
Family
ID=31479787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18871387U Pending JPH0192133U (de) | 1987-12-10 | 1987-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192133U (de) |
-
1987
- 1987-12-10 JP JP18871387U patent/JPH0192133U/ja active Pending