JPH0237736U - - Google Patents
Info
- Publication number
- JPH0237736U JPH0237736U JP11292088U JP11292088U JPH0237736U JP H0237736 U JPH0237736 U JP H0237736U JP 11292088 U JP11292088 U JP 11292088U JP 11292088 U JP11292088 U JP 11292088U JP H0237736 U JPH0237736 U JP H0237736U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- liquid supply
- pressure
- jigs
- tools
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Weting (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11292088U JPH0237736U (de) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11292088U JPH0237736U (de) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0237736U true JPH0237736U (de) | 1990-03-13 |
Family
ID=31352299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11292088U Pending JPH0237736U (de) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237736U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001340702A (ja) * | 2000-06-01 | 2001-12-11 | Kurita Water Ind Ltd | 脱泡装置および薬注装置 |
| JP2002299312A (ja) * | 2001-03-30 | 2002-10-11 | Sumitomo Precision Prod Co Ltd | 処理液供給装置 |
-
1988
- 1988-08-29 JP JP11292088U patent/JPH0237736U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001340702A (ja) * | 2000-06-01 | 2001-12-11 | Kurita Water Ind Ltd | 脱泡装置および薬注装置 |
| JP2002299312A (ja) * | 2001-03-30 | 2002-10-11 | Sumitomo Precision Prod Co Ltd | 処理液供給装置 |
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