JPH01116435U - - Google Patents
Info
- Publication number
- JPH01116435U JPH01116435U JP1050788U JP1050788U JPH01116435U JP H01116435 U JPH01116435 U JP H01116435U JP 1050788 U JP1050788 U JP 1050788U JP 1050788 U JP1050788 U JP 1050788U JP H01116435 U JPH01116435 U JP H01116435U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- inner tank
- chemical solution
- chemical liquid
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050788U JPH01116435U (de) | 1988-01-30 | 1988-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050788U JPH01116435U (de) | 1988-01-30 | 1988-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116435U true JPH01116435U (de) | 1989-08-07 |
Family
ID=31218233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1050788U Pending JPH01116435U (de) | 1988-01-30 | 1988-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116435U (de) |
-
1988
- 1988-01-30 JP JP1050788U patent/JPH01116435U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01116435U (de) | ||
| JPH02146428U (de) | ||
| JPS6410073U (de) | ||
| JPS6373364U (de) | ||
| JPH0170328U (de) | ||
| JPH022832U (de) | ||
| JPH0291689U (de) | ||
| JPS63159825U (de) | ||
| JPS62199947U (de) | ||
| JPS6364031U (de) | ||
| JPS60104269U (ja) | 化成処理装置のシヤワ−配管内におけるスラツジ堆積防止装置 | |
| JPH0359124U (de) | ||
| JPS6370144U (de) | ||
| JPS63149526U (de) | ||
| JPS6324396U (de) | ||
| JPH01130528U (de) | ||
| JPS62192638U (de) | ||
| JPH0217556U (de) | ||
| JPS5997718U (ja) | 浴槽などの浄化装置 | |
| JPS5929746U (ja) | 一槽式包埋装置の処理槽 | |
| JPS6322885U (de) | ||
| JPS5974888U (ja) | 洗浄装置 | |
| JPS60163233U (ja) | 排液管付処理槽 | |
| JPS6240830U (de) | ||
| JPS63181482U (de) |