JPS62103041U - - Google Patents
Info
- Publication number
- JPS62103041U JPS62103041U JP1985193288U JP19328885U JPS62103041U JP S62103041 U JPS62103041 U JP S62103041U JP 1985193288 U JP1985193288 U JP 1985193288U JP 19328885 U JP19328885 U JP 19328885U JP S62103041 U JPS62103041 U JP S62103041U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- mask
- nozzle
- electric field
- repair device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims 7
- 150000001875 compounds Chemical class 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985193288U JPH0320831Y2 (enExample) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985193288U JPH0320831Y2 (enExample) | 1985-12-16 | 1985-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62103041U true JPS62103041U (enExample) | 1987-07-01 |
| JPH0320831Y2 JPH0320831Y2 (enExample) | 1991-05-07 |
Family
ID=31149173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985193288U Expired JPH0320831Y2 (enExample) | 1985-12-16 | 1985-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320831Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0218561A (ja) * | 1988-07-06 | 1990-01-22 | Seiko Instr Inc | 集束イオンビーム装置 |
-
1985
- 1985-12-16 JP JP1985193288U patent/JPH0320831Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0218561A (ja) * | 1988-07-06 | 1990-01-22 | Seiko Instr Inc | 集束イオンビーム装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0320831Y2 (enExample) | 1991-05-07 |
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