JPS62101227U - - Google Patents
Info
- Publication number
- JPS62101227U JPS62101227U JP19110685U JP19110685U JPS62101227U JP S62101227 U JPS62101227 U JP S62101227U JP 19110685 U JP19110685 U JP 19110685U JP 19110685 U JP19110685 U JP 19110685U JP S62101227 U JPS62101227 U JP S62101227U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment furnace
- semiconductor
- treatment apparatus
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 238000009423 ventilation Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19110685U JPS62101227U (ar) | 1985-12-13 | 1985-12-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19110685U JPS62101227U (ar) | 1985-12-13 | 1985-12-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62101227U true JPS62101227U (ar) | 1987-06-27 |
Family
ID=31144943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19110685U Pending JPS62101227U (ar) | 1985-12-13 | 1985-12-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62101227U (ar) |
-
1985
- 1985-12-13 JP JP19110685U patent/JPS62101227U/ja active Pending
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