JPS6197840U - - Google Patents
Info
- Publication number
- JPS6197840U JPS6197840U JP18405284U JP18405284U JPS6197840U JP S6197840 U JPS6197840 U JP S6197840U JP 18405284 U JP18405284 U JP 18405284U JP 18405284 U JP18405284 U JP 18405284U JP S6197840 U JPS6197840 U JP S6197840U
- Authority
- JP
- Japan
- Prior art keywords
- container
- inspected
- wafer
- probe card
- vertical movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 4
- 239000003082 abrasive agent Substances 0.000 claims 3
- 238000007689 inspection Methods 0.000 claims 3
- 239000011324 bead Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18405284U JPS6197840U (enExample) | 1984-12-04 | 1984-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18405284U JPS6197840U (enExample) | 1984-12-04 | 1984-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6197840U true JPS6197840U (enExample) | 1986-06-23 |
Family
ID=30741539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18405284U Pending JPS6197840U (enExample) | 1984-12-04 | 1984-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197840U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH022939A (ja) * | 1988-06-13 | 1990-01-08 | Tokyo Electron Ltd | プローブ装置および検査方法 |
-
1984
- 1984-12-04 JP JP18405284U patent/JPS6197840U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH022939A (ja) * | 1988-06-13 | 1990-01-08 | Tokyo Electron Ltd | プローブ装置および検査方法 |
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