JPS6195232A - Ａｅｓ／ｓｉｍｓ複合分析装置 - Google Patents

Ａｅｓ／ｓｉｍｓ複合分析装置

Info

Publication number
JPS6195232A
JPS6195232A JP59216749A JP21674984A JPS6195232A JP S6195232 A JPS6195232 A JP S6195232A JP 59216749 A JP59216749 A JP 59216749A JP 21674984 A JP21674984 A JP 21674984A JP S6195232 A JPS6195232 A JP S6195232A
Authority
JP
Japan
Prior art keywords
energy
electron
mass
analysis
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59216749A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0570256B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yamauchi
洋 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP59216749A priority Critical patent/JPS6195232A/ja
Publication of JPS6195232A publication Critical patent/JPS6195232A/ja
Publication of JPH0570256B2 publication Critical patent/JPH0570256B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
    • G01N23/2208—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement all measurements being of a secondary emission, e.g. combination of SE measurement and characteristic X-ray measurement

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP59216749A 1984-10-16 1984-10-16 Ａｅｓ／ｓｉｍｓ複合分析装置 Granted JPS6195232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59216749A JPS6195232A (ja) 1984-10-16 1984-10-16 Ａｅｓ／ｓｉｍｓ複合分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59216749A JPS6195232A (ja) 1984-10-16 1984-10-16 Ａｅｓ／ｓｉｍｓ複合分析装置

Publications (2)

Publication Number Publication Date
JPS6195232A true JPS6195232A (ja) 1986-05-14
JPH0570256B2 JPH0570256B2 (enrdf_load_stackoverflow) 1993-10-04

Family

ID=16693317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59216749A Granted JPS6195232A (ja) 1984-10-16 1984-10-16 Ａｅｓ／ｓｉｍｓ複合分析装置

Country Status (1)

Country Link
JP (1) JPS6195232A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0570256B2 (enrdf_load_stackoverflow) 1993-10-04

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