JPS6190238U - - Google Patents
Info
- Publication number
- JPS6190238U JPS6190238U JP17521784U JP17521784U JPS6190238U JP S6190238 U JPS6190238 U JP S6190238U JP 17521784 U JP17521784 U JP 17521784U JP 17521784 U JP17521784 U JP 17521784U JP S6190238 U JPS6190238 U JP S6190238U
- Authority
- JP
- Japan
- Prior art keywords
- rod
- rods
- boat
- cvd
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000005137 deposition process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17521784U JPS6190238U (enExample) | 1984-11-19 | 1984-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17521784U JPS6190238U (enExample) | 1984-11-19 | 1984-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190238U true JPS6190238U (enExample) | 1986-06-12 |
Family
ID=30732821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17521784U Pending JPS6190238U (enExample) | 1984-11-19 | 1984-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190238U (enExample) |
-
1984
- 1984-11-19 JP JP17521784U patent/JPS6190238U/ja active Pending