JPS61164044U - - Google Patents
Info
- Publication number
- JPS61164044U JPS61164044U JP1985047691U JP4769185U JPS61164044U JP S61164044 U JPS61164044 U JP S61164044U JP 1985047691 U JP1985047691 U JP 1985047691U JP 4769185 U JP4769185 U JP 4769185U JP S61164044 U JPS61164044 U JP S61164044U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- flat surface
- spacers
- boat
- small diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985047691U JPS61164044U (enExample) | 1985-03-30 | 1985-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985047691U JPS61164044U (enExample) | 1985-03-30 | 1985-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164044U true JPS61164044U (enExample) | 1986-10-11 |
Family
ID=30563249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985047691U Pending JPS61164044U (enExample) | 1985-03-30 | 1985-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164044U (enExample) |
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1985
- 1985-03-30 JP JP1985047691U patent/JPS61164044U/ja active Pending