JPH01121935U - - Google Patents
Info
- Publication number
- JPH01121935U JPH01121935U JP1720488U JP1720488U JPH01121935U JP H01121935 U JPH01121935 U JP H01121935U JP 1720488 U JP1720488 U JP 1720488U JP 1720488 U JP1720488 U JP 1720488U JP H01121935 U JPH01121935 U JP H01121935U
- Authority
- JP
- Japan
- Prior art keywords
- substrate support
- semiconductor substrate
- surface side
- layer
- outer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 6
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1720488U JPH01121935U (enExample) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1720488U JPH01121935U (enExample) | 1988-02-10 | 1988-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121935U true JPH01121935U (enExample) | 1989-08-18 |
Family
ID=31230777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1720488U Pending JPH01121935U (enExample) | 1988-02-10 | 1988-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121935U (enExample) |
-
1988
- 1988-02-10 JP JP1720488U patent/JPH01121935U/ja active Pending