JPH01121922U - - Google Patents
Info
- Publication number
- JPH01121922U JPH01121922U JP1664788U JP1664788U JPH01121922U JP H01121922 U JPH01121922 U JP H01121922U JP 1664788 U JP1664788 U JP 1664788U JP 1664788 U JP1664788 U JP 1664788U JP H01121922 U JPH01121922 U JP H01121922U
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- susceptor
- recessed hole
- thin plate
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1664788U JPH01121922U (enExample) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1664788U JPH01121922U (enExample) | 1988-02-10 | 1988-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121922U true JPH01121922U (enExample) | 1989-08-18 |
Family
ID=31229760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1664788U Pending JPH01121922U (enExample) | 1988-02-10 | 1988-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121922U (enExample) |
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1988
- 1988-02-10 JP JP1664788U patent/JPH01121922U/ja active Pending