JPH01130542U - - Google Patents
Info
- Publication number
- JPH01130542U JPH01130542U JP1988027791U JP2779188U JPH01130542U JP H01130542 U JPH01130542 U JP H01130542U JP 1988027791 U JP1988027791 U JP 1988027791U JP 2779188 U JP2779188 U JP 2779188U JP H01130542 U JPH01130542 U JP H01130542U
- Authority
- JP
- Japan
- Prior art keywords
- side walls
- wafers
- semiconductor wafer
- storage jig
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988027791U JPH01130542U (enExample) | 1988-03-01 | 1988-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988027791U JPH01130542U (enExample) | 1988-03-01 | 1988-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130542U true JPH01130542U (enExample) | 1989-09-05 |
Family
ID=31250594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988027791U Pending JPH01130542U (enExample) | 1988-03-01 | 1988-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130542U (enExample) |
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1988
- 1988-03-01 JP JP1988027791U patent/JPH01130542U/ja active Pending