JPS63195736U - - Google Patents
Info
- Publication number
- JPS63195736U JPS63195736U JP1987087694U JP8769487U JPS63195736U JP S63195736 U JPS63195736 U JP S63195736U JP 1987087694 U JP1987087694 U JP 1987087694U JP 8769487 U JP8769487 U JP 8769487U JP S63195736 U JPS63195736 U JP S63195736U
- Authority
- JP
- Japan
- Prior art keywords
- shielding plate
- wafer carrier
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987087694U JPS63195736U (enExample) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987087694U JPS63195736U (enExample) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195736U true JPS63195736U (enExample) | 1988-12-16 |
Family
ID=30945136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987087694U Pending JPS63195736U (enExample) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195736U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004049430A1 (ja) * | 2002-11-26 | 2004-06-10 | Disco Corporation | 複数枚の半導体ウエーハを収容するためのカセット |
-
1987
- 1987-06-05 JP JP1987087694U patent/JPS63195736U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004049430A1 (ja) * | 2002-11-26 | 2004-06-10 | Disco Corporation | 複数枚の半導体ウエーハを収容するためのカセット |